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Defect Imaging and Structure Evolution in GST Films During In-situ Heating

Published online by Cambridge University Press:  30 July 2020

Chanchal Ghosh ,
Manish Singh ,
John Watt ,
Helena Silva  and
C Barry Carter
Chanchal Ghosh
Affiliation:
Department of Electrical & Computer Engineering, University of Connecticut, Storrs, Connecticut, United States
Manish Singh
Affiliation:
Department of Electrical & Computer Engineering, University of Connecticut, Storrs, Connecticut, United States
John Watt
Affiliation:
Center for Integrated Nanotechnologies, Los Alamos, New Mexico, United States
Helena Silva
Affiliation:
Department of Electrical & Computer Engineering, University of Connecticut, Storrs, Connecticut, United States
C Barry Carter
Affiliation:
Department of Chemical & Biomolecular Engineering, University of Connecticut, Storrs, CT, United States Center of Integrated Nanotechnologies, Sandia National Laboratories, Albuquerque, NM, USA

Abstract

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Type
Advances in Electron Microscopy to Characterize Materials Embedded in Devices
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 1396 - 1398
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Copyright
Copyright © Microscopy Society of America 2020

References

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