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Cooling Temperature Control System for the Cross Section Polisher

Published online by Cambridge University Press:  23 September 2015

Shogo Kataoka ,
Munehiro Kozuka ,
Tsuyoshi Wakasa ,
Koji Todoroki ,
Toru Kasai ,
Tsutomu Negishi ,
Mituhide Matusita ,
Hideo Nisioka ,
Toshiaki Suzuki  and
Natasha Erdman
Shogo Kataoka
Affiliation:
IB Business Unit, JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558JAPAN
Munehiro Kozuka
Affiliation:
IB Business Unit, JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558JAPAN
Tsuyoshi Wakasa
Affiliation:
SASM Design, JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558JAPAN
Koji Todoroki
Affiliation:
IB Business Unit, JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558JAPAN
Toru Kasai
Affiliation:
IB Business Unit, JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558JAPAN
Tsutomu Negishi
Affiliation:
IB Business Unit, JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558JAPAN
Mituhide Matusita
Affiliation:
IB Business Unit, JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558JAPAN
Hideo Nisioka
Affiliation:
IB Business Unit, JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558JAPAN
Toshiaki Suzuki
Affiliation:
IB Business Unit, JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558JAPAN
Natasha Erdman
Affiliation:
JEOL USA, Inc., 11 Dearborn Road, Peabody, MA 01960, USA

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 151 - 152
Copyright
Copyright © Microscopy Society of America 2015