Hostname: page-component-77c89778f8-gq7q9 Total loading time: 0 Render date: 2024-07-17T12:00:35.733Z Has data issue: false hasContentIssue false
  • English
  • Français

Compositional and Structural Analysis of Al-doped ZnO Multilayers by LEAP

Published online by Cambridge University Press:  27 August 2014

A. D. Giddings ,
Y. Wu ,
M. A. Verheijen ,
T. J. Prosa ,
F. Roozeboom ,
D. J. Larson  and
W. M. M. Kessels
A. D. Giddings
Affiliation:
CAMECA Instruments Inc., 5500 Nobel Drive, Madison, WI 53711, USA.
Y. Wu
Affiliation:
Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands.
M. A. Verheijen
Affiliation:
Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands.
T. J. Prosa
Affiliation:
CAMECA Instruments Inc., 5500 Nobel Drive, Madison, WI 53711, USA.
F. Roozeboom
Affiliation:
Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands.
D. J. Larson
Affiliation:
CAMECA Instruments Inc., 5500 Nobel Drive, Madison, WI 53711, USA.
W. M. M. Kessels
Affiliation:
Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands.

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 526 - 527
Copyright
Copyright © Microscopy Society of America 2014 

References

References:

[1] Wu, Y., et al., J. App. Phys. 114 (2013) p. 024308.Google Scholar
[2] Larson, D. J., et al., Ultramicroscopy 79 (1999) p. 287.Google Scholar
[3] Miller, M. K., et al., Microsc. Microanal. 13 (2007) p. 428.Google Scholar
[4] Kelly, T. F. & Larson, D. J. Annu. Rev. Mater. Res. 42 (2012) p. 1.Google Scholar