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Challenges in Characterizations of MTJ Thin Film Stack for Spin-transfer Torque MRAM Device by Analytical TEM in Wafer-foundries
Published online by Cambridge University Press: 30 July 2020
Abstract
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- Type
- Advances in Microscopy for Quantum Information Sciences
- Information
- Copyright
- Copyright © Microscopy Society of America 2020
References
Apalkov, D., et al. , Proceedings of the IEEE, 104-10, (2016), pp. 1796–1830.10.1109/JPROC.2016.2590142CrossRefGoogle Scholar
Dixit, Hemant, et al. , IEEE International Magnetic Conference (INTERMAG), (2018), pp. 1–1.Google Scholar
Thanks to Frieder Baumann at Fab8 for inspiring discussions, and Management and Legal teams for supporting the publication clearance.Google Scholar