Hostname: page-component-848d4c4894-r5zm4 Total loading time: 0 Render date: 2024-06-21T04:35:25.757Z Has data issue: false hasContentIssue false

Beam Energy Dependent Calibration of STEM and BSE Detectors for Thin Film Thickness Estimation

Published online by Cambridge University Press:  30 July 2020

Radim Skoupy
Affiliation:
The Czech Academy of Sciences, Institute of Scientific Instruments, Brno, Jihomoravsky kraj, Czech Republic
Vladislav Krzyzanek
Affiliation:
The Czech Academy of Sciences, Institute of Scientific Instruments, Brno, Jihomoravsky kraj, Czech Republic

Abstract

Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Pushing the Limits of Detection in Quantitative (S)TEM Imaging, EELS, and EDX
Copyright
Copyright © Microscopy Society of America 2020

References

Skoupy, R., Nebesarova, J., Slouf, M., Krzyzanek, V., Quantitative STEM imaging of electron beam induced mass loss of epoxy resin sections, Ultramicroscopy. 202 (2019) 4450. doi:10.1016/j.ultramic.2019.03.018.CrossRefGoogle ScholarPubMed
Dapor, M., Bazzanella, N., Toniutti, L., Miotello, A., Crivellari, M., Gialanella, S., Backscattered electrons from gold surface films deposited on silicon substrates: A joint experimental and computational investigation to add new potentiality to electron microscopy, Surf. Interface Anal. 45 (2013) 677681. doi:10.1002/sia.5144.CrossRefGoogle Scholar
Colaux, J.L., Jeynes, C., High accuracy traceable Rutherford backscattering spectrometry of ion implanted samples, Anal. Methods. 6 (2014) 120129. doi:10.1039/c3ay41398e.CrossRefGoogle Scholar
Piegari, A., Masetti, E., Thin film thickness measurement: A comparison of various techniques, Thin Solid Films. 124 (1985) 249257. doi:10.1016/0040-6090(85)90273-1.CrossRefGoogle Scholar
Libo, Z., Shengxiang, B., Rong, W., Shilan, L., Lili, M., Dechun, L., Thin film thickness measurement using electron probe microanalyzer, 2009 Int. Conf. Appl. Supercond. Electromagn. Devices, ASEMD 2009. (2009) 142144. doi:10.1109/ASEMD.2009.5306671.Google Scholar
Skoupy, R., Fort, T., Krzyzanek, V., Nanoscale Estimation of Coating Thickness on Substrates via Standardless BSE Detector Calibration, Nanomaterials. 10 (2020). doi:10.3390/nano10020332.Google Scholar
The authors gratefully acknowledge funding from the Technology Agency of the Czech Republic (project TN01000008), the Ministry of Industry and Trade of the Czech Republic (project TRIO FV30271); the infrastructure by the Czech Academy of Sciences (project RVO:68081731).Google Scholar