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Bayesian Analysis of Electron Spectroscopic SEM Images
Published online by Cambridge University Press: 01 August 2018
Abstract
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- Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 574 - 575
- Copyright
- © Microscopy Society of America 2018
References
[1] Schröder, R. R., et al
Microscopy and Microanalysis Conference Proceedings of this conference.Google Scholar
[2] Steigerwald, M., et al, Frontiers of Characterization and Metrology for Nanoelectronics
2009.Google Scholar
[7] Kammerer, J., et al
Microscopy and Microanalysis Conference Proceedings of this conference.Google Scholar
[8]. The authors acknowledge funding of the DELTA project by the German Federal Ministry of Research and Education to RRS (FKZ: 13GW0044).Google Scholar
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