Hostname: page-component-8448b6f56d-m8qmq Total loading time: 0 Render date: 2024-04-24T23:22:54.252Z Has data issue: false hasContentIssue false
  • English
  • Français

Avoiding Bias of Focused Ion Beam Edge Resolution Measurements at High Doses

Published online by Cambridge University Press:  28 September 2015

Zinovi Malamud ,
Yuval Greenzweig  and
Amir Raveh

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Ion Optics
Information
Microscopy and Microanalysis , Volume 21 , Supplement S4: Proceedings Ninth International Conference on Charged Particle Optics , June 2015 , pp. 90 - 93
Copyright
Copyright © Microscopy Society of America 2015 

References

References:

[1]Utke, I, Hoffmann, P & Melngailis, J, J. Vac. Sci. Technol. B 26 (2008). p 1197.CrossRefGoogle Scholar
[2]Utlaut, M in Handbook of charged particle optics (ed. J Orloff, (CRC Press, New York) p 523.Google Scholar
[3]Moore, G, Electronics 38 (1965). p. 114.Google Scholar
[4]Gierak, J, etal, J. Vac. Sci. Technol. B 15 (1997). p. 2373.CrossRefGoogle Scholar
[5]Jun, DS, Kutchoukov, VG & Kruit, P., J. Vac. Sci. Technol. B 29 (2011). p. 06F603–1.CrossRefGoogle Scholar
[6]Knuffman, B, Steele, AV & McClelland, JJ, J. Appl. Phys. 114 (2013), 044303.CrossRefGoogle Scholar
[7]Kime, L, et al, Phys. Rev. A 88 (2013), 033424.CrossRefGoogle Scholar
[8]Debernardi, N, et al, J. Appl. Phys. 110 (2011). p. 024501.CrossRefGoogle Scholar
[9]Debernardi, N, et al, New J. Phys. 14 (2012), 083011.CrossRefGoogle Scholar
[10]Tan, S, et al, J. Vac. Sci. Technol. B 30 (2012). p. 06F606–1.CrossRefGoogle Scholar
[11]Castaldo, V, Hagen, CW & Kruit, P, Ultramicroscopy 111 (2011). p. 982.CrossRefGoogle Scholar
[12]Schneider, CA, Rasband, WS & Eliceiri, KW, Nat. Methods 9 (2012). p. 671.CrossRefGoogle Scholar