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Atomic-scale Feedback-controlled Electron Beam Fabrication of 2D Materials

Published online by Cambridge University Press:  30 July 2021

Matthew Boebinger ,
Sudhajit Misra ,
Yiling Yu ,
Kai Xiao ,
Tyler Mathis ,
Yury Gogotsi ,
Andrew R. Lupini ,
Sergei Kalinin ,
Stephen Jesse  and
Raymond Unocic
Matthew Boebinger
Affiliation:
Oak Ridge National Laboratory, United States
Sudhajit Misra
Affiliation:
Oak Ridge National Laboratory, Oakridge, Tennessee, United States
Yiling Yu
Affiliation:
Oak Ridge National Laboratory, United States
Kai Xiao
Affiliation:
Oak Ridge National Laboratory, United States
Tyler Mathis
Affiliation:
Drexel University, United States
Yury Gogotsi
Affiliation:
Drexel University, United States
Andrew R. Lupini
Affiliation:
Oak Ridge National Laboratory, United States
Sergei Kalinin
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, Tennessee, United States
Stephen Jesse
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, United States
Raymond Unocic
Affiliation:
Oak Ridge National Laboratory, United States

Abstract

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Type
Exploring Beam-sample Interactions for Uncovering the Atomic or Dynamic Nature of Matter
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 3072 - 3073
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Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

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Work supported by Oak Ridge National Laboratory's Center for Nanophase Materials Sciences, which is a Department of Energy (DOE), Office of Science User Facility. MXene synthesis was supported by the Fluid Interface Reactions, Structures, and Transport (FIRST) Center, an Energy Frontier Research Center (EFRC) funded by the DOE, Office of Science, Office of Basic Energy Sciences.Google Scholar