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Atom Probe Tomography Productivity Enhancements

Published online by Cambridge University Press:  05 August 2019

D.A. Reinhard*
Affiliation:
CAMECA Instruments Inc., 5470 Nobel Drive, Madison, WI 53711USA.
T.R. Payne
Affiliation:
CAMECA Instruments Inc., 5470 Nobel Drive, Madison, WI 53711USA.
E.M. Strennen
Affiliation:
CAMECA Instruments Inc., 5470 Nobel Drive, Madison, WI 53711USA.
E. Oltman
Affiliation:
CAMECA Instruments Inc., 5470 Nobel Drive, Madison, WI 53711USA.
B.P. Geiser
Affiliation:
CAMECA Instruments Inc., 5470 Nobel Drive, Madison, WI 53711USA.
G.S. Sobering
Affiliation:
CAMECA Instruments Inc., 5470 Nobel Drive, Madison, WI 53711USA.
D.R. Lenz
Affiliation:
CAMECA Instruments Inc., 5470 Nobel Drive, Madison, WI 53711USA.
J. Mandt
Affiliation:
CAMECA Instruments Inc., 5470 Nobel Drive, Madison, WI 53711USA.
G.A. Groth
Affiliation:
CAMECA Instruments Inc., 5470 Nobel Drive, Madison, WI 53711USA.
D.J. Larson
Affiliation:
CAMECA Instruments Inc., 5470 Nobel Drive, Madison, WI 53711USA.
R.M. Ulfig
Affiliation:
CAMECA Instruments Inc., 5470 Nobel Drive, Madison, WI 53711USA.
T.J. Prosa
Affiliation:
CAMECA Instruments Inc., 5470 Nobel Drive, Madison, WI 53711USA.
*
*Corresponding author: David.reinhard@ametek.com
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Abstract

Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Vendor Symposium
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]van der Heide, P., J. Vac. Sci. Technol. B 36 (2018), 03F105.CrossRefGoogle Scholar
[2]Müller, E.W. et al. , Rev. Sci. Instrum. 39 (1968), p. 83.CrossRefGoogle Scholar
[3]Vandervorst, W. et al. , Phys. Status Solidi C11 (2014), p. 121.CrossRefGoogle Scholar
[4]Giddings, A.D. et al. , Scr. Mater. 148 (2018), p. 82.CrossRefGoogle Scholar
[5]Barnes, J.P. et al. , Scr. Mater. 148 (2018), p. 91.CrossRefGoogle Scholar
[6]Schmidt, M.B. et al. , APTM 2018 Abstr. June (2018), p. 222.Google Scholar
[7]Prosa, T.J. et al. , Frontiers of Characterization and Metrology for Nanoelectronics (NIST, Gaithersburg, Md, 2013), pp. 269272.Google Scholar
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