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Assessing Charging Effects on Spectral Quality for X-ray Microanalysis in Low Voltage and Variable Pressure/Environmental Scanning Electron Microscopy

Published online by Cambridge University Press:  01 December 2004

Dale E. Newbury
Dale E. Newbury
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD 20899-8371, USA
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Abstract

Energy dispersive X-ray spectrometry of uncoated insulators performed at low beam energy (incident energy ≤ 5 keV) and in the variable pressure scanning electron microscope and the environmental scanning electron microscope is subject to spectral artifacts. Charging decelerates the incident beam electrons and reduces the impact energy, lowering the available overvoltage to excite characteristic X-ray peaks. The Duane–Hunt limit of the X-ray bremsstrahlung continuum is commonly used as a diagnostic of charging. Dynamic charging effects can hide the true impact of charging on the X-ray spectrum. Careful examination of the behavior of the X-ray spectrum with time and other variables is needed to avoid spectral artifacts, particularly on relative X-ray intensities.

Keywords

chargingenergy dispersive X-ray spectrometryenvironmental scanning electron microscopyinsulating materialslow voltage scanning electron microscopyscanning electron microscopyspectral artifactsvariable pressure scanning electron microscopyX-ray microanalysis
Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue 6 , December 2004 , pp. 739 - 744
Copyright
© 2004 Microscopy Society of America

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References

REFERENCES

Dyson, N.A. (1990). X-rays in Atomic and Nuclear Physics, 2nd ed. Cambridge: Cambridge University Press.
Goldstein, J.I., Newbury, D.E., Joy, D.C., Lyman, C., Echlin, P., Lifshin, E., Sawyer, L., & Michael, J. (2003). Scanning Electron Microscopy and X-ray Microanalysis, 3rd ed. New York: Kluwer-Plenum.
Lifshin, E., Ciccarelli, M.F., & Bolon, R.B. (1980). New measurements of the voltage dependence of absolute X-ray yields. In Proceedings of the 8th International Conference on X-ray Optics and Microanalysis, Beaman, D.R., Ogilvie, R.E. & Wittry, D.B. (Eds.), p. 141. Midland, MI: Pendell.
Myklebust, R.L., Fiori, C.E., & Newbury, D.E. (1990). A robust method for determining the Duane–Hunt limit from energy dispersive spectra. In Microbeam Analysis—1990, pp. 147–149. San Francisco: San Francisco Press.
Newbury, D.E. (2000). Measures for spectral quality in low-voltage X-ray microanalysis. Scanning 22, 345–351.Google Scholar