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APT Tip Shape Modifications During Analysis, Its Implications, and the Potential to Measure Tip Shapes in Real Time via Soft-X-Ray Ptychography

Published online by Cambridge University Press:  05 August 2019

Paul van der Heide*
Affiliation:
IMEC, Kapeldreef 75, Leuven, Belgium
Igor Mathotkin
Affiliation:
IMEC, Kapeldreef 75, Leuven, Belgium Instituut voor Kern- en Stralingsfysica (IKS), KU Leuven, Celestijnenlaan 200D, Leuven, Belgium.
Wilfried Vandervorst
Affiliation:
IMEC, Kapeldreef 75, Leuven, Belgium Instituut voor Kern- en Stralingsfysica (IKS), KU Leuven, Celestijnenlaan 200D, Leuven, Belgium.
Claudia Fleischmann
Affiliation:
IMEC, Kapeldreef 75, Leuven, Belgium
*
*Corresponding author: Paul.vanderheide@imec.be

Abstract

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Type
New Frontiers in Atom Probe Tomography Applications
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Miller, MK and Forbes, RG in “Atom-Probe Tomography: The Local Electrode Atom Probe”, (Springer, New York).Google Scholar
[3]Koelling, S et al. , Journal of Applied Physics 109 (2011), p. 104909.CrossRefGoogle Scholar
[4]Melkonyan, D et al. , Ultramicroscopy 197 (2017), p. 100.CrossRefGoogle Scholar
[5]Herbig, M, Scripta Materialia 148 (2018), p. 98.CrossRefGoogle Scholar
[7]Fleischmann, C et al. , Ultramicroscopy 194 (2018), p. 221.CrossRefGoogle Scholar
[7]Hitchcock, A, Journal of Electron Spectroscopy and Related Phenomena 200 (2015), p. 40.CrossRefGoogle Scholar
[8]Batey, D et al. , Microscopy and Microanalysis 24(S2) (2018), p. 40.CrossRefGoogle Scholar
[9]Batey, D et al. , Phys. Rev. A. 89 (2014), p. 043812.CrossRefGoogle Scholar
[10]Makhotkin, I et al. , to be published.Google Scholar
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APT Tip Shape Modifications During Analysis, Its Implications, and the Potential to Measure Tip Shapes in Real Time via Soft-X-Ray Ptychography
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