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Applications of energy dependent backscatter yield variations at low voltage

Published online by Cambridge University Press:  23 September 2015

Markus Boese ,
Kerstin Sempf ,
Fang Zhou  and
Alexander Thesen
Markus Boese
Affiliation:
Zeiss Microscopy, SEM Department, Oberkochen, Germany
Kerstin Sempf
Affiliation:
Fraunhofer- IKTS, Ceramography and Phase Analysis, Dresden, Germany
Fang Zhou
Affiliation:
Zeiss Microscopy, SEM Department, Oberkochen, Germany
Alexander Thesen
Affiliation:
Zeiss Microscopy, SEM Department, Oberkochen, Germany

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 1269 - 1270
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Cazaux, J., J. Appl. Phys 112 (2012). p 84905.Google Scholar
[2] Jaksch, H. EMC 2008 proceedings (2008), 1, 555.Google Scholar