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An Aberration Corrected FIB for Nano-Area Mass Spectrometry

Published online by Cambridge University Press:  08 April 2017

S Itose ,
M Matsuya ,
S Uno ,
K Yamashita ,
S Ebata ,
M Ishihara ,
K Uchino ,
H Yurimoto ,
K Sakaguchi  and
M Kudo
S Itose
Affiliation:
JEOL Ltd, Japan
M Matsuya
Affiliation:
JEOL Ltd, Japan
S Uno
Affiliation:
JEOL Ltd, Japan
K Yamashita
Affiliation:
JEOL Ltd, Japan
S Ebata
Affiliation:
Osaka University, Japan
M Ishihara
Affiliation:
Osaka University, Japan
K Uchino
Affiliation:
Kyushu University, Japan
H Yurimoto
Affiliation:
Hokkaido University, Japan
K Sakaguchi
Affiliation:
JEOL Ltd, Japan
M Kudo
Affiliation:
JEOL Ltd, Japan

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 17 , Supplement S2 , July 2011 , pp. 654 - 655
Copyright
Copyright © Microscopy Society of America 2011