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Advanced TEM Sample Preparation Technique using FIB Tilt Stage Method

Published online by Cambridge University Press:  23 November 2012

J. Kim ,
T. Seong ,
J. Kim ,
T. Back ,
H. Kim  and
C. Kim
J. Kim
Affiliation:
Analysis Team, HYNIX, Ichon-si, Gyeonggi-do, Republic of Korea
T. Seong
Affiliation:
Analysis Team, HYNIX, Ichon-si, Gyeonggi-do, Republic of Korea
J. Kim
Affiliation:
Analysis Team, HYNIX, Ichon-si, Gyeonggi-do, Republic of Korea
T. Back
Affiliation:
Analysis Team, HYNIX, Ichon-si, Gyeonggi-do, Republic of Korea
H. Kim
Affiliation:
Analysis Team, HYNIX, Ichon-si, Gyeonggi-do, Republic of Korea
C. Kim
Affiliation:
Analysis Team, HYNIX, Ichon-si, Gyeonggi-do, Republic of Korea
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 18 , Issue S2: Proceedings of Microscopy & Microanalysis 2012 , July 2012 , pp. 634 - 635
Copyright
Copyright © Microscopy Society of America 2012

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