Advanced Nanofabrication using Helium, Neon and Gallium Ion Beams in the Carl Zeiss Orion NanoFab Microscope

D. Elswick; M. Ananth; L. Stern; J. Marshman; D. Ferranti; C. Huynh

doi:10.1017/S1431927613008519

Abstract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

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Advanced Nanofabrication using Helium, Neon and Gallium Ion Beams in the Carl Zeiss Orion NanoFab Microscope

Abstract

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