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Advanced Large Area Sample Preparation for Electron Microscopy using Initial Notches

Published online by Cambridge University Press:  22 July 2022

Richard Busch ,
Michael Krause  and
Thomas Höche
Richard Busch*
Affiliation:
Fraunhofer Institute for Microstructure of Materials and Systems IMWS, Halle / Saale, Germany
Michael Krause
Affiliation:
Fraunhofer Institute for Microstructure of Materials and Systems IMWS, Halle / Saale, Germany
Thomas Höche
Affiliation:
Fraunhofer Institute for Microstructure of Materials and Systems IMWS, Halle / Saale, Germany
*
*Corresponding author: Richard.Busch@imws.fraunhofer.de

Abstract

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Type
Advances in Focused Ion Beam Instrumentation, Applications and Techniques in Materials and Life Sciences
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 64 - 66
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Copyright
Copyright © Microscopy Society of America 2022

References

Bassim, N, Scott, K and Giannuzzi, L, MRS Bulletin 39 (2014), pp. 317-325, doi:10.1557/mrs.2014.52CrossRefGoogle Scholar
Busch, R, Krause, M, Coyle, S and Höche, T, Micron 107 (2018), pp. 35-42, doi:10.1016/j.micron.2018.01.002CrossRefGoogle Scholar
Busch, R, Krause, M, and Höche, T, Nucl. Instrum. Methods Phys. Res., Sect. B 509 (2021), pp. 12-20, doi:10.1016/j.nimb.2021.09.008CrossRefGoogle Scholar
Busch, R, Tielemann, C, Reinsch, S, Müller, R, Patzig, C, Krause, M, and Höche, T, Micron 150 (2021), 103090, doi: 10.1016/j.micron.2021.103090CrossRefGoogle Scholar
Financial support from Deutsche Forschungsgemeinschaft (DFG) in Bonn Bad Godesberg (Germany) under grant PA 3097/1-1 and by the European Union via the Europäischer Fonds für Regionale Entwicklung (EFRE) and the Investitionsbank Sachsen-Anhalt (Germany) through the project FIBNotch under the grant number 2004/00071 is gratefully acknowledged.Google Scholar