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Advanced Ion Source Technology for High Resolution and Stable FIB Nanofabrication employing Gallium and new Ion Species

Published online by Cambridge University Press:  27 August 2014

S. Bauerdick ,
J. E. Sanabia ,
P. Mazarov ,
J. Fridmann ,
L. Bruchhaus  and
R. Jede
S. Bauerdick
Affiliation:
Raith GmbH, Konrad-Adenauer-Allee 8, 44263 Dortmund, Germany
J. E. Sanabia
Affiliation:
Raith America, Inc., 2805 Veterans Memorial Hwy., Ronkonkoma, NY 11779
P. Mazarov
Affiliation:
Raith GmbH, Konrad-Adenauer-Allee 8, 44263 Dortmund, Germany
J. Fridmann
Affiliation:
Raith America, Inc., 2805 Veterans Memorial Hwy., Ronkonkoma, NY 11779
L. Bruchhaus
Affiliation:
Raith GmbH, Konrad-Adenauer-Allee 8, 44263 Dortmund, Germany
R. Jede
Affiliation:
Raith GmbH, Konrad-Adenauer-Allee 8, 44263 Dortmund, Germany

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 312 - 313
Copyright
Copyright © Microscopy Society of America 2014 

References

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