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Advanced Characterization of Novel Gate Stacks for Si CMOS by Scanning Transmission Electron Microscopy

Published online by Cambridge University Press:  01 August 2004

Susanne Stemmer ,
Melody D Agustin ,
Yan Yang ,
Steffen Schmidt ,
Brendan Foran ,
Gennadi Bersuker  and
D G Schlom
Susanne Stemmer
Affiliation:
University of California Santa Barbara
Melody D Agustin
Affiliation:
University of California Santa Barbara
Yan Yang
Affiliation:
University of California Santa Barbara
Steffen Schmidt
Affiliation:
University of California Santa Barbara
Brendan Foran
Affiliation:
International Sematech, Austin, Texas
Gennadi Bersuker
Affiliation:
International Sematech, Austin, Texas
D G Schlom
Affiliation:
Penn State University
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S02 , August 2004 , pp. 290 - 291
Copyright
© 2004 Microscopy Society of America

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