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Advanced Analytical Capabilities on FIB Instruments Using SIMS

Published online by Cambridge University Press:  30 July 2020

Tom Wirtz
Affiliation:
Luxembourg Institute of Science and Technology (LIST), Belvaux, Grevenmacher, Luxembourg
Olivier De Castro
Affiliation:
Luxembourg Institute of Science and Technology (LIST), Belvaux, Grevenmacher, Luxembourg
Antje Biesemeier
Affiliation:
Luxembourg Institute of Science and Technology (LIST), Belvaux, Grevenmacher, Luxembourg
Hung Quang Hoang
Affiliation:
Luxembourg Institute of Science and Technology (LIST), Belvaux, Grevenmacher, Luxembourg
Jean-Nicolas Audinot
Affiliation:
Luxembourg Institute of Science and Technology (LIST), Belvaux, Grevenmacher, Luxembourg

Abstract

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Type
Surface and Subsurface Microscopy and Microanalysis of Physical and Biological Specimens - Applications of Secondary Ion Mass Spectrometry to Organic and Material Systems
Copyright
Copyright © Microscopy Society of America 2020

References

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Wirtz, T., Dowsett, D., Philipp, P., Helium Ion Microscopy, ed. by Hlawacek, G., Gölzhäuser, A., Springer, 2017Google Scholar
Wirtz, T., De Castro, O., Audinot, J.-N., Philipp, P., Ann. Rev. Anal. Chem. 12 (2019)10.1146/annurev-anchem-061318-115457CrossRefGoogle Scholar
This project has received funding from the European Union's Horizon 2020 Research and Innovation Programme under grant agreement No. 720964.Google Scholar