Hostname: page-component-78c5997874-v9fdk Total loading time: 0 Render date: 2024-11-17T21:15:07.361Z Has data issue: false hasContentIssue false

Accurate Diffraction Peak Identification for Scanning Electron Nanodiffraction Based on Automated Image Processing and Feature Detection

Published online by Cambridge University Press:  04 August 2017

Renliang Yuan
Affiliation:
Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois, USA Fredrick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois, USA
Yifei Meng
Affiliation:
Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois, USA Fredrick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois, USA
Jiong Zhang
Affiliation:
Intel Corp., Hillsboro, Oregon, USA
Jian-Min Zuo
Affiliation:
Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois, USA Fredrick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois, USA

Abstract

Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Copyright
© Microscopy Society of America 2017 

Footnotes

*

First two authors contributed equally to this work.

References

[1] Cowley, J.M. “Electron Diffraction Techniques.” 1993: International Union of Crystallography.Google Scholar
[2] Zuo, J.M. & Spence, J.C.H. Advanced Transmission Electron Microscopy 2017 Springer.Google Scholar
[3] Zuo, J.M., et al, Science 2003 300(5624p. 14191421.Google Scholar
[4] Zuo, J.M., et al., Microscopy Research and Technique 2004 64(5-6p. 347355.Google Scholar
[5] Zuo, J.M. & Spence, J.C.H. Advanced Transmission Electron Microscopy: Imaging and Diffraction in Nanoscience 2016 Springer.Google Scholar
[6] Tao, J., et al, Physical Review Letters 2009 103, p. 097202.Google Scholar
[7] Kim, K.H., et al, Micron 2015 71, p. 3945.CrossRefGoogle Scholar
[8] Meng, Y. & Zuo, J.M. ICUrJ 2016 3, p. 300308.Google Scholar
[9] Zuo, J.M., et al, Ultramicroscopy 2014 136, p. 5060.CrossRefGoogle Scholar
[10] Canny, J.F. IEEE Transactions on Pattern Analysis and Machine Intelligence 1986 8(6p. 679698.Google Scholar
[11] Duda, R.O. & Hart, P. E., Comm. ACM (1972 15, p. 1115.Google Scholar
[12] This work is supported by a grant from Semiconductor Research Corporation.Google Scholar