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Theory and New Applications of Ex Situ Lift Out

Published online by Cambridge University Press:  16 July 2015

Lucille A. Giannuzzi ,
Zhiyang Yu ,
Denise Yin ,
Martin P. Harmer ,
Qiang Xu ,
Noel S. Smith ,
Lisa Chan ,
Jon Hiller ,
Dustin Hess  and
Trevor Clark
Lucille A. Giannuzzi*
Affiliation:
EXpressLO LLC, 5483 Lee St., Unit 12, Lehigh Acres, FL 33971, USA
Zhiyang Yu
Affiliation:
Department of Materials Science and Engineering, Lehigh University, Bethlehem, PA 18015, USA
Denise Yin
Affiliation:
Department of Materials Science and Engineering, Lehigh University, Bethlehem, PA 18015, USA
Martin P. Harmer
Affiliation:
Department of Materials Science and Engineering, Lehigh University, Bethlehem, PA 18015, USA
Qiang Xu
Affiliation:
DENSsolutions, Delftechpark 26, 2628 XH Delft, The Netherlands
Noel S. Smith
Affiliation:
Oregon Physics, LLC, 19075 NW Tanasbourne Dr., Suite 150, Hillsboro, OR 97124, USA
Lisa Chan
Affiliation:
Tescan USA, Inc., 765 Commonwealth Dr., Suite 101, Warrendale, PA 15086, USA
Jon Hiller
Affiliation:
Tescan USA, Inc., 765 Commonwealth Dr., Suite 101, Warrendale, PA 15086, USA
Dustin Hess
Affiliation:
Materials Research Institute, The Pennsylvania State University, Millennium Science Complex, University Park, PA 16802, USA
Trevor Clark
Affiliation:
Materials Research Institute, The Pennsylvania State University, Millennium Science Complex, University Park, PA 16802, USA
*
*Corresponding author. Lucille.Giannuzzi@EXpressLO.com
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Abstract

The ex situ lift out (EXLO) adhesion forces are reviewed and new applications of EXLO for focused ion beam (FIB)-prepared specimens are described. EXLO is used to manipulate electron transparent specimens on microelectromechanical systems carrier devices designed for in situ electron microscope analysis. A new patented grid design without a support film is described for EXLO. This new slotted grid design provides a surface for holding the specimen in place and also allows for post lift out processing. Specimens may be easily manipulated into a backside orientation to reduce FIB curtaining artifacts with this slotted grid. Large EXLO specimens can be manipulated from Xe+ plasma FIB prepared specimens. Finally, applications of EXLO and manipulation of FIB specimens using a vacuum probe lift out method are shown. The vacuum probe provides more control for placing specimens on the new slotted grids and also allows for easy manipulation into a backside configuration.

Keywords

ex situ lift outFIBTEMspecimen preparationPick&Place
Type
Materials Applications and Techniques
Information
Microscopy and Microanalysis , Volume 21 , Issue 4 , August 2015 , pp. 1034 - 1048
Copyright
© Microscopy Society of America 2015 

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