Hostname: page-component-848d4c4894-r5zm4 Total loading time: 0 Render date: 2024-06-22T22:09:05.287Z Has data issue: false hasContentIssue false

Method for Cross-sectional Transmission Electron Microscopy Specimen Preparation of Composite Materials Using a Dedicated Focused Ion Beam System

Published online by Cambridge University Press:  08 August 2002

Toshie Yaguchi
School of Engineering, Ibaraki University, Japan Hitachi Science Systems, Japan
Takeo Kamino
Hitachi Science Systems, Japan
Tohru Ishitani
Instrument Division, Hitachi Ltd., Japan
Ryoichi Urao
School of Engineering, Ibaraki University, Japan
Get access


A new method for transmission electron microscope (TEM) specimen preparation using a focused ion beam (FIB) system that results in a lower rate of gallium (Ga) implantation has been developed. The method was applied to structural and analytical studies of composite materials such as silicon (Si)-devices and magneto-optical disk. To protect the specimens against Ga ion irradiation, amorphous tungsten (W) was deposited on the surface of the specimen prior to FIB milling. The deposition was quite effective in reducing the Ga implantation rate, and energy-dispersive X-ray (EDX) analysis of these specimens detected 0.3Ð1.5% Ga incorporated in the thinned area. FIB milling times for these specimens were 1.5Ð2 hr. Although the milling rate was high, all the materials were properly prepared for TEM study, and clear crystal lattice images were observed on all specimens.

© 1999 Microscopy Society of America

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)