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The Influence of Dopant Type on Polysilicon Grain Growth and Solid Phase Epitaxial Regrowth

Published online by Cambridge University Press:  02 July 2020

M.G. Shlepr
Affiliation:
Harris Semiconductor, P. O. Box 883, Melbourne, FL, 32905
G.A. Schrantz
Affiliation:
Harris Semiconductor, P. O. Box 883, Melbourne, FL, 32905
A.L. Rivoli
Affiliation:
Harris Semiconductor, P. O. Box 883, Melbourne, FL, 32905
G. Bajor
Affiliation:
Harris Semiconductor, P. O. Box 883, Melbourne, FL, 32905

Extract

A recent process technology to manufacture bipolar junction transistors utilizes polysilicon emitters. Polysilicon is deposited, appropriately doped to form both NPN and PNP transistors, and exposed to temperatures that result in grain growth. Since polysilicon is in contact with Si( 100) at the emitter, base, and collector (Fig. 1), solid phase epitaxial regrowth might also occur. Production runs with this structure occasionally produce transistors with low current gain. High and low gain NPN and PNP transistors were characterized by transmission electron microscopy.

Vertical sections through NPN/PNP transistor arrays were made by the wedge technique, low-angle ion milled to electron-transparency, and viewed at 200 KV. The grain size of the polysilicon on oxide was recorded and estimated. The extent of epitaxial regrowth was quantified for each of the Si (100) contact areas. Convergent Beam Electron Diffraction (CBED) was used to confirm the orientation of the presumed regrown polysilicon.

Type
Recent Developments in Microscopy for Studying Electronic and Magnetic Materials
Copyright
Copyright © Microscopy Society of America 1997

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References

1. Klepeis, S.J.et al., MRS Symp. Proc. 115(1988)179.CrossRefGoogle Scholar

2. Kamins, T.I., Polycrystalline Silicon for Integrated Circuit Applications, Boston:Kluwer Academic Publishers (1988)75.CrossRefGoogle Scholar

3. Ajuria, S.A.et al., IEEE Trans. Elect. Devices 39(1992)1420.CrossRefGoogle Scholar

4. Williams, J.D.and Ashburn, P., J. Appl. Phys. 72(1992)3169.CrossRefGoogle Scholar

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