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Field Emission SEM with a Newly Developed FEGUN and Conical Strongly Excited Objective Lens

Published online by Cambridge University Press:  02 July 2020

H. Kazumori
Affiliation:
JEOL LTD., 1-2, Musashino 3-chome, Akishima, Tokyo 196, Japan
A. Yamada
Affiliation:
JEOL LTD., 1-2, Musashino 3-chome, Akishima, Tokyo 196, Japan
M. Mita
Affiliation:
JEOL LTD., 1-2, Musashino 3-chome, Akishima, Tokyo 196, Japan
T. Nokuo
Affiliation:
JEOL LTD., 1-2, Musashino 3-chome, Akishima, Tokyo 196, Japan
M. Saito
Affiliation:
JEOL LTD., 1-2, Musashino 3-chome, Akishima, Tokyo 196, Japan

Extract

A newly developed cold FE-GUN which enables to us to obtain large probe current and low emission noise, and conical strongly excited objective lens has been installed on the JSM-6700F Scanning Electron Microscope (SEM). In the range of accelerating voltages from 0.5 to 15kV, this instrument has got much better resolution as compared with in-lens type SEM (Ohyama et al 1986)(Fig. 1). We can obtain high-resolution secondary electron images with large samples (ex. 150mm ϕ×10mmH).

Our old type objective lens (Kazumori et al 1994) has the limitation of working distance (WD), but the new lens enables us to work at very short WD at accelerating voltage of 15kV. As a result the spherical (Cs) and chromatic (Cc) aberration constants are 1.9mm and 1.7mm respectively at a WD of 3mm.

In order to get large probe current, we increased emission current and got near the distance between the t ip of emi tter and the pr inciple plane of condenser lens.

Type
Scanning Electron Microscopy
Copyright
Copyright © Microscopy Society of America

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References

1.Ohyama, J. et al (1986), Proc. XI Int. Cong. On Electron Microscopy, Vol. 1, 373374.Google Scholar
2.Kazumori, K. et al (1994),ICEM 13-PARIS Proc. 6162Google Scholar
3.Miyokawa, T. et al (1988), Development of conical anode FE-GUN for low voltage SEM,EMSA,978979Google Scholar

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Field Emission SEM with a Newly Developed FEGUN and Conical Strongly Excited Objective Lens
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