This article reviews experiments on the production of low-energy, high-current electron beams (LEHCEB) and their use for surface modification of materials. It is shown that electron guns with a plasma anode and an explosive emission cathode are most promising for the production of this type of beams. The problems related to the initiation of explosive emission and the production and transportation of LEHCEBs in plasma-filled diodes are considered. It has been shown that if the rise time of the accelerating voltage is comparable to or shorter than the time it takes for an ion to fly through the space charge layer, the electric field strength at the cathode and the electron current density in the layer are increased. Experimentally, it has been established that the current of the beam transported in the plasma channel is 1–2 orders of magnitude greater than the critical Pierce current and several times greater than the chaotic current of the anode plasma electrons. Methods for improving the uniformity of the energy density distribution over the beam cross section are described. The nonstationary temperature and stress fields formed in metal targets have been calculated. The features of the structure-phase transformations in the surface layers of materials irradiated with LEHCEBs have been considered. It has been demonstrated that in the surface layers quenched from the liquid state, nonequilibrium structure-phase states are formed.