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The effect of nature and pressure of ambient environment on laser-induced breakdown spectroscopy and ablation mechanisms of Si

Published online by Cambridge University Press:  09 August 2017

K. Zehra
Affiliation:
Centre for Advanced Studies in Physics, Govt. College University, Lahore 54000, Pakistan
S. Bashir
Affiliation:
Centre for Advanced Studies in Physics, Govt. College University, Lahore 54000, Pakistan
S.A. Hassan*
Affiliation:
Department of Energy Materials and Telecommunication, Institut national de la recherche scientifique (INRS), Québec, Canada
Q.S. Ahmed
Affiliation:
Centre for Advanced Studies in Physics, Govt. College University, Lahore 54000, Pakistan Department of Electrical Engineering, Information Technology University (ITU), Lahore 54000, Pakistan
M. Akram
Affiliation:
Centre for Advanced Studies in Physics, Govt. College University, Lahore 54000, Pakistan
A. Hayat
Affiliation:
Centre for Advanced Studies in Physics, Govt. College University, Lahore 54000, Pakistan
*
Address correspondence and reprint requests to: S.A. Hassan, Department of Energy Material and Telecommunication, Institut national de la recherche scientifique (INRS), 1650, boulevard Lionel-Boulet Varennes (Québec) J3X 1S2, Canada. E-mail: hkazmi25@gmail.com

Abstract

The effect of nature and pressure of ambient environment on laser-induced breakdown spectroscopy (LIBS) and ablation mechanisms of silicon (Si) have been investigated. A Q-switched Nd-YAG laser with the wavelength of 1064 nm, pulse duration of 10 ns, and pulsed energy of 50 mJ was employed. Si targets were exposed under ambient environments of inert gases of argon, neon, and helium for different pressures ranging from 5 to 760 torr. The influence of nature and pressure of ambient gases on the emission intensity of Si plasma have been explored by using the LIBS spectrometer system. The plasma parameters such as electron temperature and number density were determined by applying Boltzmann plot and Stark broadening method, respectively. Our experimental results suggest that the nature and pressure of ambient environment play a significant role for generation, recombination, and expansion of plasma and consequently affect the excitation temperature as well as electron density of plasma. The surface morphological analysis of laser-irradiated Si was performed by using scanning electron microscope (SEM). Various kinds of structures, for example laser-induced periodic surface structures or ripples, cones, droplets, and craters have been generated and their density and size are found to be strongly dependent upon the ambient environment. A quantitative analysis of particulate size and crater depth measured from SEM images showed a strong correlation between plasma parameters and the growth of micro/nanostructures on the modified Si surface.

Type
Research Article
Copyright
Copyright © Cambridge University Press 2017 

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References

Ahmed, Q.S., Bashir, S., Jalil, S.A., Shabbir, M.K., Mahmood, K., Akram, M., Khalid, A., Yaseen, N. & Arshad, A. (2016). Surface, electrical and mechanical modifications of PMMA after implantation with laser produced iron plasma ions. Nucl. Instrum. Methods Phys. Res B 378, 17.CrossRefGoogle Scholar
Akram, M., Bashir, S., Hayat, A., Mahmood, K., Ahmad, R. & Khaleeq-U-Rahaman, M. (2014). Effect of laser irradiance on the surface morphology and laser induced plasma parameters of zinc. Laser Part. Beams 32, 119128.CrossRefGoogle Scholar
Arshad, A., Bashir, S., Hayat, A., Akram, M., Khalid, A., Yaseen, N. & Ahmad, Q.S. (2016). Effect of magnetic field on laser-induced breakdown spectroscopy of graphite plasma. Appl. Phys. B 122, 63.Google Scholar
Bashir, S., Rafique, M.S. & Husinsky, W. (2012). Femtosecond laser-induced subwavelength ripples on Al, Si, CaF2 and CR-39. Nucl. Instrum. Methods Phys. Res. B 275, 16.Google Scholar
Behrenberg, D., Franzka, S., Petermann, N., Wiggers, H. & Hartmann, N. (2012). Photothermal laser processing of thin silicon nanoparticle films: On the impact of oxide formation on film morphology. Appl. Phys. A 106, 853861.CrossRefGoogle Scholar
Bogaerts, A., Chen, Z. & Autrique, D. (2008). Double pulse laser ablation and laser induced breakdown spectroscopy: A modeling investigation. Spectrochim. Acta B 63, 746754.Google Scholar
Bonse, J., Baudach, S., Krüger, J., Kautek, W. & Lenzner, M. (2002). Femtosecond laser ablation of silicon–modification thresholds and morphology. Appl. Phys. A 74, 1925.Google Scholar
Bulajic, D., Corsi, M., Cristoforetti, G., Legnaioli, S., Palleschi, V., Salvetti, A. & Tognoni, E. (2002). A procedure for correcting self-absorption in calibration free-laser induced breakdown spectroscopy. Spectrochim. Acta B 57, 339353.CrossRefGoogle Scholar
Chen, Z., Bleiner, D. & Bogaerts, A. (2006). Effect of ambient pressure on laser ablation and plume expansion dynamics: A numerical simulation. J. Appl. Phys. 99, 063304.Google Scholar
Chen, Z., Wu, Q., Yang, M., Tang, B., Yao, J., Rupp, R.A., Cao, Y. & Xu, J. (2013). Generation and evolution of plasma during femtosecond laser ablation of silicon in different ambient gases. Laser Part. Beams 13, 17.Google Scholar
Cowpe, J.S., Pilkingtine, R.D., Astin, J.S. & Hill, A.E. (2009). The effect of ambirent pressure on laser-induced Si plasma temeperature, density and morphology. J. Phys. D: Appl. Phys. 42, 165202.Google Scholar
Cristoforetti, G., Legnaioli, S., Palleschi, V., Salvetti, A. & Tognoni, E. (2004). Influence of ambient gas pressure on laser-induced breakdown spectroscopy technique in the parallel double-pulse configuration. Spectrochim. Acta B 59,19071917.CrossRefGoogle Scholar
Dawood, A., Bashir, S., Akram, M., Hayat, A., Ahmed, S., Iqbal, M.H. & Kazmi, A.H. (2015). Effect of nature and pressure of ambient environments on the surface morphology, plasma parameters, hardness, and corrosion resistance of laser-irradiated Mg-alloy. Laser Part. Beams 33, 315330.Google Scholar
Farid, N., Bashir, S. & Khaliq, M. (2012). Effect of ambient gas conditions on laser-induced copper plasma and surface morphology. Phys. Scr. 85, 015702.Google Scholar
George, S., Kumar, A., Singh, R.K. & Nampoori, V.P.N. (2010). Effect of ambient gas on the expansion dynamics of plasma plumeformed by laser blow off of thin film. Appl. Phys. A 98, 901908.Google Scholar
Giacomo, D.A., Dell'Aglio, M., Gaudiuso, R., Amoruso, S. & Pascale, D.O. (2012). Effects of the background environment on formation, evolution and emission spectra of laser-induced plasmas. Spectrochim. Acta B 78, 119.Google Scholar
Gondala, M.A. & Khalil, A.A.I. (2012). Effect of ambient conditions on laser induced breakdown spectra. Laser Phys. 22, 17711779.Google Scholar
Harilal, S.S., Bindhu, C.V., Nampoori, V.P.N. & Vallabhan, C.P.G. (1998). Influence of ambient gas on the temperature and density of laser-produced carbon plasma. Appl. Phys. Lett. 72, 167169.Google Scholar
Hayat, A., Latif, A., Rafique, M.S., Khaleeq-ur-Rahman, M., Bhatti, K., Usman, A. & Rehman, A. (2012). Surface modifications of materials by repetitive laser pulses. Radiat. Eff. Defects Solids 167, 403409.Google Scholar
Iida, Y. (1990). Effects of atmosphere on laser vaporization and excitation processes of solid samples. Spectrochim. Acta B 45B, 13531367.Google Scholar
Khalil, A.A.I. (2015). Chemical etching method assisted double-pulse LIBS for the analysis of silicon crystals. Appl. Phys. A 119, 10871099.Google Scholar
Khan, S., Bashir, S., Hayat, A., Khaleeq-ur-Rahman, M. & Ul-Haq, F. (2013). Laser-induced breakdown spectroscopy of tantalum plasma. Phys. Plasmas 20, 073104.CrossRefGoogle Scholar
Kim, D., Yoo, K., Park, H., Oh, K. & Kim, D. (1997). Quantitative analysis of aluminum impurities in zinc alloy by laser-induced breakdown spectroscopy. Appl. Spectrosc. 51, 2229.Google Scholar
Liu, H.C., Mao, X.L., Yoo, J.H. & Russo, R.E. (1999). Early phase laser induced plasma diagnostics and mass removal during single-pulse laser ablation of silicon. Spectrochim. Acta B 54, 16071624.Google Scholar
Luo, W.F., Zhao, X.X., Sun, Q.B., Gao, C.X., Tang, J., Wang, H.J & Zhao, W. (2010). Characteristics of the aluminum alloy plasma produced by a 1064 nm Nd:YAG laser with different irradiances. Pramana – J. Phys. 74, 945959.Google Scholar
Mahdieh, M. & Momeni, A. (2014). From single pulse to double pulse ns laser ablation of silicon in water: Photoluminescence enhancement of silicon nanocrystals. Laser Phys. 25, 015901.Google Scholar
Mahmood, A.S., Venkatakrishnan, K., Tan, B. & Alubiady, M. (2010). Effect of laser parameters and assist gas on spectral response of silicon fibrous nanostructure. J. Appl. Phys. 108, 094327.Google Scholar
Mateo, M., Piñon, V., Anglos, D. & Nicolas, G. (2012). Effect of ambient conditions on ultraviolet femtosecond pulse laser induced breakdown spectra. Spectrochim. Acta B 74, 1823.Google Scholar
Milan, M. & Laserna, J.J. (2001). Diagnostics of silicon plasmas produced by visible nanosecond laser ablation. Spectrochim. Acta B 56, 275288.Google Scholar
Nakimana, A., Tao, H., Camino, A., Gao, X., Hao, Z. & Lin, J. (2012). Effect of ambient pressure on femtosecond laserinduced breakdown spectroscopy of Al in Argon. Int. Conf. on Optoelectronics and Microelectronics (ICOM, Changchun University of Science and TechnologyChangchun, Jilin, China).Google Scholar
Narayanan, V. & Thareja, R.K. (2004). Emission spectroscopy of laser-ablated Si plasma related to nanoparticle formation. Appl. Surf. Sci. 222, 382393.Google Scholar
Penczak, J.S. Jr, Liu, Y., Schaller, R.D., Rich, D.H. & Gordon, R.J. (2012). The mechanism for continuum polarization in laser induced breakdown spectroscopy of Si(111). Spectrochim. Acta B 74–75, 310.Google Scholar
Peng, Y., Chen, H.Y., Zhu, C.G., Zhang, D.S., Zhou, Y.Y., Xiang, H. & Cai, B. (2012). The effect of laser wavelength on the formation of surface-microstructured silicon. Mater. Lett. 83, 127129.Google Scholar
Shabbir, M.K., Bashir, S., Ahmed, Q.S., Yaseen, N., Jalil, S.A., Akram, M., Mahmood, K. & Khalid, A. (2017). Effect of substrate temperature on the growth of copper oxide thin films deposited by pulsed laser deposition technique. Surf. Rev. Lett. 25, 18500531850066.Google Scholar
Shaikh, M.N., Kalhoro, S.M., Hussaina, A. & Baig, A.M. (2013). Spectroscopic study of a lead plasma produced by the 1064 nm, 532 nm and 355 nm of a Nd:YAG laser. Spectrochim. Acta B 88, 198202.Google Scholar
Shaikh, N.M., Hafeez, S. & Baig, M.A. (2007). Spectroscopic studies of Ca plasma generated by the fundamental, second, and third harmonics of a Nd:YAG laser. Spectrochim. Acta B 62, 1311.Google Scholar
Shaikh, N.M., Hafeez, S., Kalyar, M. A., Ali, R. & Baig, A.A. (2008). Spectroscopic characteristics of laser ablation brass plasma. J. Appl. Phys. 104, 103108.Google Scholar
Shaikh, N.M., Rashid, B., Hafeez, S., Jamil, Y. & Baig, M.A. (2006). Measurement of electron density and temperature of a laser-induced zinc plasma. J. Phys. D: Appl. Phys. 39, 13841391.Google Scholar
Shaikh, N.M., Rashid, B., Hafeez, S., Mahmood, S., Saleem, M. & Baig, M. (2006). Diagnostics of cadmium plasma produced by laser ablation. J. Appl. Phys. 100, 073102.Google Scholar
Sobhani, M. & Mahdieh, M.H. (2013). Comparison of sub-micro/nano structure formation on polished silicon surface irradiated by nanosecond laser beam in ambient air and distilled water. Laser Part. Beams 13, 19.Google Scholar
Tognoni, E., Palleschi, V., Corsi, M. & Cristoforetti, G. (2002). Quantitative micro-analysis by laser-induced breakdown spectroscopy: A review of the experimental approaches. Spectrochim. Acta B 57, 11151130.Google Scholar
Wang, Y.L., Xu, W., Zhou, Y., Chu, L.Z. & Fu, G.S. (2007). Influence of pulse repetition rate on the average size of silicon nanoparticles deposited by laser ablation. Laser Part. Beams 25, 913.Google Scholar
Womer, R. (1931). Ionization of helium, neon, and argon. Phys. Rev. 38, 454.Google Scholar