Hostname: page-component-78c5997874-xbtfd Total loading time: 0 Render date: 2024-11-17T16:25:48.151Z Has data issue: false hasContentIssue false
  • English
  • Français

Effect of RF on RF nitrogen discharge with induced argon plasma at high pressure

Published online by Cambridge University Press:  03 July 2012

YINAN WANG ,
YUE LIU ,
SHU ZHENG  and
GUOQIANG LIN
YINAN WANG
Affiliation:
Key Laboratory of Materials Modification by Laser Ion and Electron Beams, Ministry of Education, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116023, China (liuyue@dlut.edu.cn)
YUE LIU
Affiliation:
Key Laboratory of Materials Modification by Laser Ion and Electron Beams, Ministry of Education, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116023, China (liuyue@dlut.edu.cn)
SHU ZHENG
Affiliation:
Key Laboratory of Materials Modification by Laser Ion and Electron Beams, Ministry of Education, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116023, China (liuyue@dlut.edu.cn)
GUOQIANG LIN
Affiliation:
Key Laboratory of Materials Modification by Laser Ion and Electron Beams, Ministry of Education, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116023, China (liuyue@dlut.edu.cn)
Get access Rights & Permissions [Opens in a new window]

Abstract

A one-dimensional fluid model is built to study the effect of radio frequency (RF) on the characteristics of RF nitrogen discharge with induced argon plasma at high pressure. The model is solved by a finite difference method, and the numerical results are obtained. The numerical results show that by modulating driven frequency, the discharge can obtain higher plasma density. Moreover, the discharge is operated in a stable α mode in a range of 100 MHz of driven frequency.

Type
Papers
Information
Journal of Plasma Physics , Volume 78 , Issue 6 , December 2012 , pp. 673 - 676
Copyright
Copyright © Cambridge University Press 2012

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Bogaerts, A. 2004 Hybrid Monte Carlo-fluid model for studying the effects of nitrogen addition to argon glow discharge. Spectrochim. Acta B 9, 126–140.Google Scholar
Deng, Y., Han, X., Shafiq-ur-Rehman, and Liu, Y. 2008 Modeling characteristics of nonequilibrium processes during breakdown of capacitive RF argon glow discharge. Phys. Plasmas 15, 053507.CrossRefGoogle Scholar
Juan, Z., Jizhong, S., Dezhen, W., Chaofeng, S. and Liying, L. 2011 Modeling of high frequncy atmoshperic pressure Ar/SiH4/H2 glow discharge. Thin Solid Films 519 (20), 7014–7019.Google Scholar
Kanazawa, S., Kogoma, M., Moriwaki, T. and Okazaki, S. 1988 Stable glow plasma at atmoshpheric pressure. J. Phys. D 21, 838–840.Google Scholar
Kochetov, V., Napartovich, A. P., Vagin, N. P. and Yuryshev, N. N. 2001 Role of N2 molecules in pulse discharge production of I atoms for a pulsed chemical oxygen–iodine laser. J. Phys. D 44, 355204.Google Scholar
Li, Z. Y. 2009 Numerical simulation on DC glow discharge with varied gas pressure. Master's thesis, Dalian University of Technology, China.Google Scholar
Li, H.-P., Sun, W.-T., Wang, H.-B., Li, G. and Bao, C.-Y. 2005 Electrical features of radio-frequncy, atmospheric pressure, bare-metallic-electrode glow discharge. Plasma Chem Plasma 27, 529–545.CrossRefGoogle Scholar
Lymberopoulos, D. P. and Economou, D. J. 1993 Fluid simulation of glow discharges: effect of metastable atoms in argon. Appl. Phys. 73, 3668.CrossRefGoogle Scholar
Sawada, Y., Ogawa, S. and Kogoma, M. 1995 Synthesis of plasma-polymerized tetraethoxysilane and hexamethyldisiloxane films prepared by atmospheric pressure glow discharge. J. Phys. D: Appl. Phys. 28 1661–1669.CrossRefGoogle Scholar
Shang, W., Wang, D. and Zhang, Y. 2008 Radio frequency atmospheric pressure glow discharge in α and γ modes between two coaxial electrodes. Phys. Plasmas 15, 093003.CrossRefGoogle Scholar
Shi, J. J. and Kong, M. G. 2005 Mechanisms of the α and γ modes in radio-frequency atmospheric glow discharges. J. Appl. Phys. 97, 023306.CrossRefGoogle Scholar
Walsh, J. L., Shi, J. J. and Kong, M. G. 2006 Contrasting characteristics of pulsed and sinusoidal cold atmospheric plasma jets. Appl. Phys. Lett. 88, 17150.CrossRefGoogle Scholar
You, Z. 2009 The fluid simulation of N2–O2 dual-frequency capacitively coupled plasma. Master's thesis, Dalian University of Technology, China.Google Scholar
Zhang, Y.-T. and Cui, S.-Y. 2011 Frequency effects on the electron density and α → γ mode transition in atmospheric radio frequency discharges. Phys. Plasmas 18, 083509.CrossRefGoogle Scholar
Zhu, X. M. and Kong, M. G. 2005 Electron kinetic effects in atmospheric dielectric-barrier glow discharges. J. Appl. Phys. 97, 083301.CrossRefGoogle Scholar