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Orientation control of sol-gel-derived lead zirconate titanate film by addition of polyvinylpyrrolidone

Published online by Cambridge University Press:  01 April 2005

Gun-Tae Park ,
Chee-Sung Park ,
Jong-Jin Choi  and
Hyoun-Ee Kim
Gun-Tae Park
Affiliation:
School of Material Science and Engineering, Seoul National University, Seoul 151-742, Korea
Chee-Sung Park
Affiliation:
School of Material Science and Engineering, Seoul National University, Seoul 151-742, Korea
Jong-Jin Choi
Affiliation:
School of Material Science and Engineering, Seoul National University, Seoul 151-742, Korea
Hyoun-Ee Kim*
Affiliation:
School of Material Science and Engineering, Seoul National University, Seoul 151-742, Korea
*
a) Address all correspondence to this author. e-mail: kimhe@snu.ac.kr
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Abstract

Highly (100)- and (111)-oriented lead zirconate titanate (PZT) films with a thickness of 350 nm were deposited on platinized Si substrates through a single spinning of a PZT sol containing polyvinylpyrrolidone (PVP) as an additive. The crystallographic orientation of the film was strongly influenced by pyrolysis conditions after spin coating. When the spin-coated sol was pyrolyzed at temperatures above 320 °C for relatively long periods of time (>5 min), (111)-oriented film was formed after annealing at 700 °C for 10 min. On the other hand, when the same sol was pyrolyzed at 320 °C for short periods of time (<5 min), the film was strongly oriented to the (100) direction after annealing. Organic residues derived from PVP decomposition acted as nucleation sites for the (100) oriented grains during annealing after the pyrolysis. The effective d33 of the (100)-oriented PZT film (100 pC/N) was much higher than that of the (111)-oriented film (62 pC/N) with the same thickness.

Keywords

FilmPiezoelectricSol-gel
Type
Research Article
Information
Journal of Materials Research , Volume 20 , Issue 4 , April 2005 , pp. 882 - 888
Copyright
Copyright © Materials Research Society 2005

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References

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