Hostname: page-component-8448b6f56d-qsmjn Total loading time: 0 Render date: 2024-04-24T09:19:24.095Z Has data issue: false hasContentIssue false
  • English
  • Français

Optical properties of amorphous hydrogenated carbon films: A spectroscopic ellipsometry study

Published online by Cambridge University Press:  31 January 2011

Shuhan Lin  and
Shuguang Chen
Shuhan Lin
Affiliation:
Department of Physics, Zhongshan University, Guangzhou, People's Republic of China
Shuguang Chen
Affiliation:
Department of Physics, Zhongshan University, Guangzhou, People's Republic of China
Get access

Abstract

Optical properties of plasma-deposited amorphous hydrogenated carbon films were studied by spectroscopic ellipsometry. From the ellipsometry data, the real and imaginary parts, n and k, of the complex index of refraction of the film have been deduced for photon energies between 2.0 and 4.0 eV for as-grown as well as for thermally annealed films. Here n and k showed considerable variation with subsequent annealing, even under 400°C. A tentative explanation of the results is proposed.

Type
Articles
Information
Journal of Materials Research , Volume 2 , Issue 5 , October 1987 , pp. 645 - 647
Copyright
Copyright © Materials Research Society 1987

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1Wagner, J., Wild, Ch., Pohl, F., and Koidl, P., Appl. Phys. Lett. 48, 106 (1986).CrossRefGoogle Scholar
2Smith, F. W., J. Appl. Phys. 55, 764 (1984).CrossRefGoogle Scholar
3Dillon, R. O., and Woollam, J. A., Phys. Rev. B 29, 3482 (1984).CrossRefGoogle Scholar
4Lin, S. and Feldman, B. J., Phys. Rev. B 28, 413 (1983).CrossRefGoogle Scholar
5Gambino, R. J. and Thompson, J. A., Solid State Commun. 34, 15 (1985).Google Scholar
6Watanabe, I., Hasegawa, S., and Kurata, Y., Jpn. J. Appl. Phys. 21, 856 (1982).CrossRefGoogle Scholar
7Fink, J., Muller-Heinzerling, Th., Pflufer, J., Scherer, B., Dischler, B., Koidl, P., Bubenzer, A., and Sah, R. E., Phys. Rev. B 30, 4713 (1984).CrossRefGoogle Scholar
8Khan, A. Azim, Mathine, D., and Woollam, J. A., Phys. Rev. B 28, 7229 (1983).CrossRefGoogle Scholar
9Mo, D., Chen, S., Yu, Y., and Huang, B., Acta Phys. Sin. 29, 673 (1980).Google Scholar
10Savvides, N., J. Appl. Phys. 58, 518 (1985).CrossRefGoogle Scholar
11Dischler, B., Bubenzer, A., and Koidl, P., Appl. Phys. Lett. 42, 636 (1983).CrossRefGoogle Scholar