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Nitrogen Effects on Crystallization Kinetics of Amorphous TiOxNy Thin Films

Published online by Cambridge University Press:  31 January 2011

Kyle Hukari ,
Rand Dannenberg  and
E. A. Stach
Kyle Hukari
Affiliation:
AFG Development Center, Petaluma, California 94954
Rand Dannenberg
Affiliation:
AFG Development Center, Petaluma, California 94954
E. A. Stach
Affiliation:
National Center for Electron Microscopy, Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720
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Abstract

The crystallization behavior of amorphous TiOxNy (x ≫ y) thin films was investigated by in situ transmission electron microscopy. The Johnson–Mehl–Avrami–Kozolog (JMAK) theory was used to determine the Avrami exponent, activation energy, and the phase velocity pre-exponent. Addition of nitrogen inhibited diffusion, increasing the nucleation temperature, while decreasing the growth activation energy. Kinetic variables extracted from individual crystallites were compared to JMAK analysis of the fraction transformed, and a change of 6% in the activation energy led to agreement between the methods. From diffraction patterns and index of refraction the crystallized phase was found to be predominantly anatase.

Type
Articles
Information
Journal of Materials Research , Volume 17 , Issue 3 , March 2002 , pp. 550 - 555
Copyright
Copyright © Materials Research Society 2002

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