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Measurement of surface topography and area-specific nanohardness in the scanning force microscope

Published online by Cambridge University Press:  03 March 2011

D. Scholl ,
M.P. Everson  and
R.C. Jaklevic
D. Scholl
Affiliation:
Ford Motor Company, MD3028/SRL, P.O. Box 2053, Dearborn, Michigan 48121-2053
M.P. Everson
Affiliation:
Ford Motor Company, MD3028/SRL, P.O. Box 2053, Dearborn, Michigan 48121-2053
R.C. Jaklevic
Affiliation:
Ford Motor Company, MD3028/SRL, P.O. Box 2053, Dearborn, Michigan 48121-2053
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Abstract

A Scanning Force Microscope (SFM) is employed to indent and image surfaces with sub-micron resolution. The SFM image shows the area and depth of each indentation as well as its location with respect to nearby topographic surface features. The image also reveals the surface roughness, which can set a lower limit on useful nanoindentation size. A cross section of a nitrided steel surface is measured to illustrate the method. The use of the SFM with separate tip-cantilever structures for indenting and imaging has significant advantages over other nanohardness methods for the study of samples with lateral inhomogeneities.

Type
Articles
Information
Journal of Materials Research , Volume 10 , Issue 10 , October 1995 , pp. 2503 - 2506
Copyright
Copyright © Materials Research Society 1995

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