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Laser photosublimation of compound semiconductors

Published online by Cambridge University Press:  31 January 2011

M. Rothschild
Affiliation:
Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, Massachusetts 02173
C. Arnone
Affiliation:
Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, Massachusetts 02173
D. J. Ehrlich
Affiliation:
Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, Massachusetts 02173
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Abstract

The visible-laser sublimation of CdTe, HgCdTe, CdS, and GaAs has been studied. A dynamic light guiding has been identified with an active feedback mechanism and is connected to the observation of 0.4 μm wide single-mode guiding structures during deep etching. The incipient stages of sublimation have been studied by mass spectrometry and are discussed in relation to diffusion mechanisms in the solid state.

Type
Articles
Copyright
Copyright © Materials Research Society 1987

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References

REFERENCES

1Arnone, C., Rothschild, M., and Ehrlich, D. J., Appl. Phys. Lett. 48, 736 (1986).Google Scholar
2See, for instance, Adams, M. J., An Introduction to Optical Wave-guides (Wiley, New York, 1981).Google Scholar
3Aspnes, D. (private communication).Google Scholar
4The contribution to a of additional scattering due to small surface undulations such as those in Fig. 1 (b) is negligible under our conditions where the undulation amplitude < λ/2π; see Marcuse, D., Theory of Dielectric Optical Waveguides (Academic, New York, 1974), Chap. 4.Google Scholar
5Allen, T. H. and Ash, G. S., Opt. Eng. 20, 373 (1981).CrossRefGoogle Scholar
6Bammes, P., Klucker, R., Koch, E. E., and Tuomi, T., Phys. Status Solidi B 49, 561 (1972).CrossRefGoogle Scholar
7Thermophysical Properties of Matter, edited by Touloukian, Y. S., Powell, R. W., Cho, C. Y., and Klemens, P. G. (Plenum, New York, 1970), Vol. 1.Google Scholar
8A similar model, restricted to the sublimation of CdS, was suggested by Somorjai, G. A. and Lester, J. E., J. Chem. Phys. 43, 1450 (1965).Google Scholar
11Shaw, D. and Whelan, R. C., Phys. Status Solidi 36, 705 (1969).CrossRefGoogle Scholar
10Brown, M. and Willoughby, A. F. W., J. Cryst. Growth 59, 27 (1982).CrossRefGoogle Scholar
11Takita, K., Murakami, K., Otake, H., Masuda, K., Seki, S., and Kudo, H., Appl. Phys. Lett. 44, 996 (1984).CrossRefGoogle Scholar
12Palfrey, H. D., Brown, M., and Willoughby, A. F. W., J. Electron. Mater. 12, 863 (1983).CrossRefGoogle Scholar