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Infrared optical properties of aged porous GaAs

Published online by Cambridge University Press:  31 January 2011

S. Zangooie ,
M. Schubert ,
T. E. Tiwald  and
J. A. Woollam
S. Zangooie
Affiliation:
Center for Microelectronic and Optical Materials Research, and Department of Electrical Engineering, University of Nebraska, Lincoln, Nebraska 68588
M. Schubert
Affiliation:
Center for Microelectronic and Optical Materials Research, and Department of Electrical Engineering, University of Nebraska, Lincoln, Nebraska 68588
T. E. Tiwald
Affiliation:
J.A. Woollam Co., Inc., 645 M Street, Suite 102, Lincoln, Nebraska 68508
J. A. Woollam*
Affiliation:
Center for Microelectronic and Optical Materials Research, and Department of Electrical Engineering, University of Nebraska, Lincoln, Nebraska 68588
*
a)Address all correspondence to this author.
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Abstract

Aging properties of porous GaAs were investigated nondestructively using variable angle of incidence infrared spectroscopic ellipsometry. In addition to the thickness and volume porosity, properties of the solid part of the porous material are investigated in terms of the long-wavelength dielectric function and chemical composition. The high sensitivity is employed to detect and identify infrared resonant absorptions related to different vibration modes of cubic and amorphous As2O3. Resonances centered at 333.3, 480, 785.8, 838, and 1045.5 cm−1 are from cubic As2O3, whereas resonances centered at 350, 490, and 808.5 cm−1 are from amorphous As2O3.

Type
Rapid Communications
Information
Journal of Materials Research , Volume 16 , Issue 5 , May 2001 , pp. 1241 - 1244
Copyright
Copyright © Materials Research Society 2001

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