Hostname: page-component-76fb5796d-x4r87 Total loading time: 0 Render date: 2024-04-25T10:24:43.428Z Has data issue: false hasContentIssue false
  • English
  • Français

Composition/structure/property relations of multi-ion-beam reactive sputtered lead lanthanum titanate thin films: Part II. Textured microstructure development

Published online by Cambridge University Press:  03 March 2011

G.R. Fox ,
S.B. Krupanidhi  and
K.L. More
G.R. Fox
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, Pennsylvania 16802
S.B. Krupanidhi
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, Pennsylvania 16802
K.L. More
Affiliation:
High Temperature Materials Laboratory, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6064
Get access

Abstract

This paper, the second of three parts, presents a detailed analysis of the crystallographic texture observed in lead lanthanum titanate (PLT) thin films deposited by multi-ion-beam reactive sputtering. Since films were deposited at a substrate temperature of 100 °C, they exhibit an amorphous structure that can be described by the structure zone model. The as-deposited microstructure is transformed via crystallization of the perovskite phase and PbO evaporation during postdeposition annealing. Transmission electron microscopy was used to determine that phase pure PLT films develop textured clusters (as large as 700 nm in diameter) consisting of 〈100〉 aligned 10 nm nanocrystals. As excess PbO is added to the PLT film, the textured cluster size decreases until only isolated PLT nanocrystals exist. Below a critical quantity of excess PbO in the as-deposited film (approximately 15 mole%), the textured cluster structure produces a 〈100〉 texture through the film thickness, which generates x-ray diffraction patterns typical of textured microstructures. At high PbO contents, the excess PbO causes the formation of clusters that are smaller than the film thickness, resulting in a polycrystalline-type x-ray diffraction pattern. A qualitative model describing microstructure development is presented.

Type
Articles
Information
Journal of Materials Research , Volume 8 , Issue 9 , September 1993 , pp. 2191 - 2202
Copyright
Copyright © Materials Research Society 1993

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1Hennings, D., Mater. Res. Bull. VI, 329 (1971).CrossRefGoogle Scholar
2Hennings, D. and Härdtl, K. H., Phys. Status Solidi A 3, 465 (1970).Google Scholar
3Landolt–Börnstein Numerical Data and Functional Relationships in Science and Technology, Group III: Crystal and Solid State Physics, Ferroelectrics and Related Substances, edited by Hellwege, K. H. (Springer-Verlag, New York, 1981), Vol. 16, subvolume a: Oxides.Google Scholar
4Ogawa, T., Senda, A., and Kasanami, T., Jpn. J. Appl. Phys. 30 (9B), 2145 (1991).Google Scholar
5Iijima, K., Tomita, Y., Takayama, R., and Ueda, I., J. Appl. Phys. 60 (1), 361 (1986).Google Scholar
6Matsubara, S., Miura, S., Miyasaka, Y., and Shohata, N., J. Appl. Phys. 66 (12), 5826 (1989).Google Scholar
7Fox, G. R., Krupanidhi, S. B., More, K. L., and Allard, L. F., J. Mater. Res. 7, 3039 (1992).Google Scholar
8Thornton, J. A., Annu. Rev. Mater. Sci. 7, 239 (1977).Google Scholar
9Fox, G. R. and Krupanidhi, S. B., J. Mater. Res. 8, 2203 (1993).Google Scholar
10Lead 99.999% pure, CERAC, Milwaukee, WI.Google Scholar
11Lanthanum 99.9% pure, Advent Associates, Ltd., Trafford, PA.Google Scholar
12Titanium 99.9% pure, CERAC, Milwaukee, WI.Google Scholar
13Nova Electronic Materials, Dallas, TX.Google Scholar
14Ethylene glycol, Fisher Scientific, Fair Lawn, NJ.Google Scholar
15M-bond 610 Adhesive, M-Line Accessories, Measurements Group, Inc., Raleigh, NC.Google Scholar
16Crystalbond 509, Aremco Products, Inc., Ossining, NY.Google Scholar
17Dimple Grinder, Model 656, Gatan, Inc., Warrendale, PA.Google Scholar
18Dual Ion Mill, Model 600, Gatan Inc., Pleasanton, CA.Google Scholar
192000 FX Analytical Electron Microscope, JEOL Ltd., Japan.Google Scholar
204000EX Ultrahigh Resolution Transmission Electron Microscope, JEOL Ltd., Japan.Google Scholar
21Vook, R. W., Int. Met. Rev. 27, 209 (1982).Google Scholar
22Halliyal, A., Study of the Piezoelectric and Pyroelectric Properties of Polar Glass-Ceramics, Doctoral Thesis, The Pennsylvania State University, 60–94 (1984).Google Scholar
23Mullin, J. W., Crystallization (Butterworths, London, 1961).Google Scholar
24McMillan, P. W., Glass-Ceramics, 2nd ed. (Academic Press, New York, 1979).Google Scholar
25Kingery, W. D., Bowen, H. K., and Uhlmann, D. R., Introduction to Ceramics, 2nd ed. (John Wiley & Sons, Inc., New York, 1976), pp. 448–468.Google Scholar