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Chromium implantation in silica glass

Published online by Cambridge University Press:  31 January 2011

E. Cattaruzza ,
R. Bertoncello ,
F. Trivillin ,
P. Mazzoldi ,
G. Battaglin ,
L. Mirenghi  and
P. Rotolo
E. Cattaruzza
Affiliation:
Dipartimento di Chimica Inorganica, Metallorganica ed Analitica and Consorzio Interuniversitario Nazionale per la Chimica dei Materiali (INCM), via Loredan 4, and Unità dell'Istituto Nazionale per la Fisica della Materia (INFM), Dipartimento di Fisica, via Marzolo 8, 35131 Padova, Italy
R. Bertoncello
Affiliation:
Dipartimento di Chimica Inorganica, Metallorganica ed Analitica and Consorzio Interuniversitario Nazionale per la Chimica dei Materiali (INCM), via Loredan 4, 35131 Padova, Italy
F. Trivillin
Affiliation:
Dipartimento di Chimica Inorganica, Metallorganica ed Analitica and Consorzio Interuniversitario Nazionale per la Chimica dei Materiali (INCM), via Loredan 4, 35131 Padova, Italy
P. Mazzoldi
Affiliation:
Unità dell'Istituto Nazionale per la Fisica della Materia (INFM), Dipartimento di Fisica, via Marzolo 8, 35131 Padova, Italy
G. Battaglin
Affiliation:
Unità dell'Istituto Nazionale per la Fisica della Materia (INFM), Dipartimento di Chimica Fisica, Calle Larga Santa Marta 2137, 30123 Venezia, Italy
L. Mirenghi
Affiliation:
PA.S.T.I.S.-CNRSM (Parco Scientifico e Tecnologico Ionico-Salentino), strada statale 7 Appia km 71300, 72100 Brindisi, Italy
P. Rotolo
Affiliation:
PA.S.T.I.S.-CNRSM (Parco Scientifico e Tecnologico Ionico-Salentino), strada statale 7 Appia km 71300, 72100 Brindisi, Italy
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Abstract

Silica glass was implanted with chromium at the energy of 35 and 160 keV and at fluences varying from 1 × 1016 to 11 × 1016 ions cm−2. In a set of chromium-implanted samples significant amounts of carbon were detected. Samples were characterized by x-ray photoelectron spectroscopy, x-ray-excited Auger electron spectroscopy, secondary ion mass spectrometry, and Rutherford backscattering spectrometry. Chromium silicide and chromium oxide compounds were observed; the presence of carbon in the implanted layers induces the further formation of chromium carbide species. Thermodynamic considerations applied to the investigated systems supply indications in agreement with the experimental evidences.

Type
Articles
Information
Journal of Materials Research , Volume 11 , Issue 1 , January 1996 , pp. 229 - 235
Copyright
Copyright © Materials Research Society 1996

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