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Self-separated PZT thick films with bulk-like piezoelectric and electromechanical properties

Published online by Cambridge University Press:  01 June 2011

Qing Su
Affiliation:
Materials Science and Engineering Program, Texas A&M University, College Station, Texas 77843-3128
Benpeng Zhu
Affiliation:
Department of Biomedical Engineering and NIH Transducer Resource Center, University of Southern California, Los Angeles, California 90089-1111
Joon Hwan Lee
Affiliation:
Materials Science and Engineering Program, Texas A&M University, College Station, Texas 77843-3128
Zhenxing Bi
Affiliation:
Department of Electrical and Computer Engineering, Texas A&M University, College Station, Texas 77843-3128
Kirk Shung
Affiliation:
Department of Biomedical Engineering and NIH Transducer Resource Center, University of Southern California, Los Angeles, California 90089-1111
Qifa Zhou*
Affiliation:
Department of Biomedical Engineering and NIH Transducer Resource Center, University of Southern California, Los Angeles, California 90089-1111
Shinichi Takeuchi
Affiliation:
Medical Engineering Course, Graduate school of Engineering, Toin University of Yokohama, Yokohama 225-8501, Japan
Bae Ho Park
Affiliation:
Division of Quantum Phases & Devices, Department of Physics, Konkuk University, Seoul 143-701, South Korea
Quanxi Jia*
Affiliation:
Center for Integrated Nanotechnologies, Los Alamos National Laboratory, Los Alamos, New Mexico 87545
Haiyan Wang*
Affiliation:
Materials Science and Engineering Program and Department of Electrical and Computer Engineering, Texas A&M University, College Station, Texas 77843-3128
*
a)Address all correspondence to these authors. e-mail: qifazhou@usc.edu
b)e-mail: qxjia@lanl.gov
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Abstract

Self-separated Pb(Zr0.52Ti0.48)O3 (PZT) films were processed by a hydrothermal deposition and a rapid thermal separation method, followed by a sol–gel filling and sintering process. The films possess excellent piezoelectric and electromechanical properties close to those of bulk material. The maximum remnant polarization is over 30 μC/cm2 and the electromechanical coupling factor (kt) reaches as high as 0.52. The unique microstructure characteristics of the PZT films, such as their highly dense structure, columnar grains, well-connected grain boundaries, and well-dispersed nanopores, could all contribute to the enhanced piezoelectric and electromechanical properties.

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Articles
Copyright
Copyright © Materials Research Society 2011

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References

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