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Novel photoluminescence from hydrogenated amorphous carbon films prepared by using xylene source

Published online by Cambridge University Press:  31 January 2011

Jun Xu
Affiliation:
National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093, China and National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, CAS, Shanghai 200083, China
Wei Li
Affiliation:
National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093
Tianfu Ma
Affiliation:
National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093
Zhifeng Li
Affiliation:
National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, CAS, Shanghai 200083, China
Li Wang
Affiliation:
National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, CAS, Shanghai 200083, China
Kunji Chen
Affiliation:
National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, CAS, Shanghai 200083, China
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Abstract

Hydrogenated amorphous carbon thin films were prepared by using organic hydrocarbon source, xylene (C8H10), in a plasma enhanced chemical vapor deposition-(PECVD) system. In contrast to a single broad PL peak from methane (CH4)-based hydrogenated amorphous carbon films, a new PL feature was observed from xylene-based a–C:H films in the blue-green light region. It was found that the aromatic-structures were enhanced in xylene-based a–C:H films deposited at high radio frequency power, which may result in the existence of luminescence centers in the carbon films and induce the appearance of a new PL peak.

Type
Rapid Communications
Copyright
Copyright © Materials Research Society 2001

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