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Interfacial adhesion and friction of pyrolytic carbon thin films on silicon substrates

Published online by Cambridge University Press:  31 January 2011

N. Deyneka-Dupriez
Affiliation:
Institute of Micro- and Nanomaterials, University of Ulm, D-89081 Ulm, Germany
U. Herr
Affiliation:
Institute of Micro- and Nanomaterials, University of Ulm, D-89081 Ulm, Germany
H-J. Fecht
Affiliation:
Institute of Micro- and Nanomaterials, University of Ulm, D-89081 Ulm, Germany
A. Pfrang
Affiliation:
Institute of Applied Physics, University of Karlsruhe, D-76128 Karlsruhe, Germany
Th. Schimmel
Affiliation:
Institute of Applied Physics, University of Karlsruhe, D-76128 Karlsruhe, Germany; and Institute of Nanotechnology, Research Center Karlsruhe, D-76021 Karlsruhe, Germany
B. Reznik
Affiliation:
Laboratory of Electron Microscopy, University of Karlsruhe, D-76128 Karlsruhe, Germany
D. Gerthsen
Affiliation:
Laboratory of Electron Microscopy, University of Karlsruhe, D-76128 Karlsruhe, Germany
Corresponding
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Abstract

Frictional behavior and interfacial adhesion of differently textured pyrolytic carbon layers on Si substrate were investigated by indentation and scratch testing. A large amount of elastic recovery and a low coefficient of friction (μ = 0.05 to 0.09) were observed. Elastic/plastic and frictional behaviors of the coatings are strongly influenced by the microstructure of the pyrolytic carbon films, especially by the texture. The critical load at which the first abrupt increase in the normal displacement occurs was used to characterize interfacial adhesive strength. A pyrolytic carbon film deposited at higher residence time from a gas mixture containing 3% oxygen exhibited higher critical loads than film deposited at lower residence time without oxygen. The results can be understood if one assumes that the gas phase composition during deposition significantly influences the bonding strength at the interface. Failure mechanisms are discussed for both types of films.

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Copyright © Materials Research Society 2008

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References

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Interfacial adhesion and friction of pyrolytic carbon thin films on silicon substrates
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