Hostname: page-component-8448b6f56d-42gr6 Total loading time: 0 Render date: 2024-04-19T21:02:59.769Z Has data issue: false hasContentIssue false
  • English
  • Français

Process development for the reproducible roughness measurement of optical surfaces using white light interferometry

Published online by Cambridge University Press:  22 September 2014

Johannes Liebl ,
Heiko Biskup ,
Sebastian Draxinger ,
Rolf Rascher  and
Christine Wünsche
Get access

Abstract

Today a wide range of instruments are available for the rapid roughness quantification of optical surfaces but especially for three dimensional measurement methods no standardized process is established. This leads to different results, even if the same specimen is tested with similar measurement devices. In order to solve this problem an exemplary process development is described in this paper. To do this firstly the term of roughness is defined as a surface deviation and then the functionality and importance of filters in roughness measurement as well as the used measurement devices are described. The following chapter defines the used materials and methods which were used during the measurement process. In the last part of this paper the results are discussed and a process assignment is suggested.

Keywords

Reproducibleroughnessmeasurementwhite light interferometrysurfacemetrologyopticprocess assignment
Type
Research Article
Information
International Journal of Metrology and Quality Engineering , Volume 5 , Issue 1 , 2014 , 104
Copyright
© EDP Sciences 2014

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Normenausschuss Technisch Grundlagen (NATG), DIN 4760 – Gestaltabweichungen, Begriffe, Ordnungssystem (1982), p. 2
Normenausschuss Technisch Grundlagen (NATG), DIN 4287 – Geometrische Produktspezifikation (GPS) – Oberflächenbeschaffenheit: Tastschnittverfahren – Benennungen, Definitionen und Kenngrößen der Oberflächenbeschaffenheit (2010), p. 27
K.J. Stout, P.J. Sullivan, W.P. Dong, E. Mainsah, N. Luol, T. Mathia, H. Zahouani, The development of methods for the characterization of roughness in three dimensions (1993), p. 219
Normenausschuss Technisch Grundlagen (NATG), DIN EN ISO 16610-21 – Geometrische Produktspezifikation (GPS) – Filterung – Teil 21: Lineare Profilfilter: Gauß-Filter (2013), p. 31
M. Krystek, Die digitale Implementierung des Profilfilters nach DIN EN ISO 11562 (2004), pp. 4–6
Normenausschuss Technisch Grundlagen (NATG), DIN 4288 – Geometrische Produktspezifikation (GPS) – Oberflächenbeschaffenheit: Tastschnittverfahren-Regeln und Verfahren für die Beurteilung der Oberflächenbeschaffenheit (1998), p. 12
D. Malacara, Optical Shop Testing (2007), p. 714
Normenausschuss Technisch Grundlagen (NATG), DIN 4788 – Geometrische Produktspezifikation (GPS) – Oberflächenbeschaffenheit: Tastschnittverfahren-Regeln und Verfahren für die Beurteilung der Oberflächenbeschaffenheit (1998), p. 12