Highly performing adaptive optical systems are required for next generation giant telescopes as well as next generation instrumentation for 10 m-class telescopes. Different types of AO systems are currently under study, including Multi-Conjugate AO (MCAO), high dynamic range AO, and low-order AO for distributed partial correction AO. These systems require a large variety of deformable mirrors with very challenging parameters. The development of new technologies based on micro-opto-electro-mechanical systems (MOEMS) is promising for future deformable mirrors. We are currently developing a MDM based on an array of electrostatic actuators with attachments to a continuous mirror on top. The most challenging building block for this device is the high optical quality mirror. Our first results show a very efficient planarization of the surface with our design. The integration of this mirror surface on top of an actuator array is under investigation.