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Fast Thickness Measurement of Thin Crystalline Layers by Relative Intensities in XRPD Method

Published online by Cambridge University Press:  06 March 2019

G. Kimmel ,
G. Shafirstein  and
M. Bamberger
G. Kimmel
Affiliation:
Department of Materials Engineering Technion, Haifa 32000, Israel
G. Shafirstein
Affiliation:
Department of Materials Engineering Technion, Haifa 32000, Israel
M. Bamberger
Affiliation:
Department of Materials Engineering Technion, Haifa 32000, Israel
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Extract

In this work a continuous wave CO2 laser was used for melting a layer of amorphous alumina obtained by anodizing 6061 aluminum plates. Melting the surface of the anodized plates led to the formation of a new uniform corundum layer at the expense of some of the amorphous coating, resulting in a double layer coating of crysta11ine on amorphous.

The characterization of the corundum layer is essential for process optimization study. Among the non-destructive methods X-ray diffraction is useful, because it provides us with selected data on the crystalline layer.

Type
VI. Analysis of Thin Films by XRD and XRF
Information
Advances in X-Ray Analysis , Volume 32: Thirty-Seventh Annual Conference on Applications of X-ray Analysis, August 1-5, 1988 , 1988 , pp. 293 - 301
Copyright
Copyright © International Centre for Diffraction Data 1988

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References

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