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Layer Thickness Determination of Thin Films by Grazing Incidence X-Ray Experiments using Interference Effect

Published online by Cambridge University Press:  06 March 2019

Kenji Sakurai
National Research Institute for Metals: 1-2-1 Sengen, Tsukuba Ibaraki 305, Japan
Atsuo Iida
Photon Factory, National Laboratory for High Energy Physics 1-1 Oho, Tsukuba, Ibaraki 305, Japan
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A novel method using Fourier transform algorithm is proposed to determine each layer thickness of multi-layered thin films from interference oscillation observed in X-ray specular reflection. The peak position in Fourier space gives each layer thickness of the film. The principle of the present technique as well as its applications are described.

XI. Thin-Film and Surface Characterization by XRS and XPS
Copyright © International Centre for Diffraction Data 1991

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