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Layer Thickness Determination of Thin Films by Grazing Incidence X-Ray Experiments using Interference Effect
Published online by Cambridge University Press: 06 March 2019
Abstract
A novel method using Fourier transform algorithm is proposed to determine each layer thickness of multi-layered thin films from interference oscillation observed in X-ray specular reflection. The peak position in Fourier space gives each layer thickness of the film. The principle of the present technique as well as its applications are described.
- Type
- XI. Thin-Film and Surface Characterization by XRS and XPS
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- Copyright © International Centre for Diffraction Data 1991
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