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Preface

Published online by Cambridge University Press:  23 February 2010

Shuichi Miyazaki
Affiliation:
University of Tsukuba, Japan
Yong Qing Fu
Affiliation:
Heriot-Watt University, Edinburgh
Wei Min Huang
Affiliation:
Nanyang Technological University, Singapore
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Summary

Shape memory alloys (SMAs) are materials that, after being severely deformed, can return to their original shape upon heating. These materials possess a number of desirable properties, namely, high power to weight (or force to volume) ratio, thus the ability to induce large transformation stress and strain upon heating/cooling, pseudoelasticity (or superelasticity), high damping capacity, good chemical resistance and biocompatibility, etc. These unique features have attracted much attention to the potential applications of SMAs as smart (or intelligent) and functional materials. More recently, thin film SMAs have been recognized as a new type of promising and high-performance material for microelectromechanical system (MEMS) and biological applications.

Among these SMA films, TiNi based films are the most promising ones. They are typically prepared by a sputtering method. Other technologies, e.g., laser ablation, ion beam deposition, arc plasma ion plating, plasma spray and flash evaporation, have also been reported in the literature, but with some intrinsic problems. It is well known that the transformation temperatures, shape memory behaviors and superelasticity of the sputtered TiNi films are sensitive to metallurgical factors (alloy composition, contamination, thermomechanical treatment, annealing and aging processes, etc.), sputtering conditions (co-sputtering with multi-targets, target power, gas pressure, target-to-substrate distance, deposition temperature, substrate bias, etc.), and the application conditions (loading conditions, ambient temperature and environment, heat dissipation, heating/cooling rate, strain rate, etc.).

The main advantages for MEMS applications of TiNi thin film include high power density, large displacement and actuation force, low operation voltage, etc. The work output per unit volume of thin film SMA exceeds that of all other microactuation materials and mechanisms.

Type
Chapter
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Thin Film Shape Memory Alloys
Fundamentals and Device Applications
, pp. xv - xvii
Publisher: Cambridge University Press
Print publication year: 2009

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  • Preface
  • Edited by Shuichi Miyazaki, University of Tsukuba, Japan, Yong Qing Fu, Heriot-Watt University, Edinburgh, Wei Min Huang, Nanyang Technological University, Singapore
  • Book: Thin Film Shape Memory Alloys
  • Online publication: 23 February 2010
  • Chapter DOI: https://doi.org/10.1017/CBO9780511635366.001
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  • Preface
  • Edited by Shuichi Miyazaki, University of Tsukuba, Japan, Yong Qing Fu, Heriot-Watt University, Edinburgh, Wei Min Huang, Nanyang Technological University, Singapore
  • Book: Thin Film Shape Memory Alloys
  • Online publication: 23 February 2010
  • Chapter DOI: https://doi.org/10.1017/CBO9780511635366.001
Available formats
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Save book to Google Drive

To save content items to your account, please confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your account. Find out more about saving content to Google Drive.

  • Preface
  • Edited by Shuichi Miyazaki, University of Tsukuba, Japan, Yong Qing Fu, Heriot-Watt University, Edinburgh, Wei Min Huang, Nanyang Technological University, Singapore
  • Book: Thin Film Shape Memory Alloys
  • Online publication: 23 February 2010
  • Chapter DOI: https://doi.org/10.1017/CBO9780511635366.001
Available formats
×