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2 - Fundamentals of Electromigration

Published online by Cambridge University Press:  05 May 2022

Paul S. Ho ,
Chao-Kun Hu ,
Martin Gall  and
Valeriy Sukharev
Paul S. Ho
Affiliation:
University of Texas, Austin
Chao-Kun Hu
Affiliation:
IBM T J Watson Research Center, New York
Martin Gall
Affiliation:
GlobalFoundries
Valeriy Sukharev
Affiliation:
Siemens Business
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Summary

In this chapter, electromigration is formulated as a phenomenon of mass transport in metals under an electrical current driving force within the framework of irreversible thermodynamics. Based on this approach, the solute effect on electromigration is analyzed by considering the correlation in atomic jumping processes, a problem that is of interest to understand how solute addition can affect electromigration in metals. This is followed by a review of the theory of the electromigration driving force and a discussion of the controversy of the electron screening effect. This chapter is concluded by reviewing the results on substitutional and interstitial electromigration in bulk metals.

Keywords

electromigrationfundamentalsirreversible thermodynamicstheorysubstitutional systemsinterstitial systems
Type
Chapter
Information
Electromigration in Metals
Fundamentals to Nano-Interconnects
 , pp. 8 - 33
Publisher: Cambridge University Press
Print publication year: 2022

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