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Characterization of Green Laser Crystallized GeSi Thin Films
Published online by Cambridge University Press: 20 June 2011
Abstract
Green laser crystallization of a-Ge0.85Si0.15 films deposited using Low Pressure Chemical Vapour Deposition is studied. Large grains of 8x2 μm2 size were formed using a location-controlled approach. Characterization is done using Scanning Electron Microscopy, Atomic Force Microscopy, X-Ray Photoelectron Spectroscopy and X-Ray Diffraction.
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- Copyright © Materials Research Society 2011