%PDF-1.3
%
1 0 obj
<<
/Metadata 2 0 R
/Pages 3 0 R
/Type /Catalog
>>
endobj
4 0 obj
<<
/AAPL#3AKeywords []
/Author (J Li)
/CreationDate (D:20180422190840Z)
/Creator (Word)
/Keywords ()
/ModDate (D:20220416104428+00'00')
/Producer <4D6163204F5320582031302E31322E362051756172747A20504446436F6E746578743B206D6F646966696564207573696E6720695465787453686172709220352E352E313020A9323030302D323031362069546578742047726F7570204E5620284147504C2D76657273696F6E29>
/Subject (Microsc. Microanal. Proceedings, \(2018\), 24, S1, 8-9, doi: 10.1017/S1431927618000533)
/Title (Analytical TEM Characterization of Source/Drain Contacts in Advanced Semiconductor Devices)
>>
endobj
2 0 obj
<<
/Length 2657
/Subtype /XML
/Type /Metadata
>>
stream
2018-04-22T19:08:40+00:00
Word
2018-07-10T08:16:49-05:00
2022-04-16T10:44:28+00:00
Mac OS X 10.12.6 Quartz PDFContext; modified using iTextSharp™ 5.5.10 ©2000-2016 iText Group NV (AGPL-version)
application/pdf
Analytical TEM Characterization of Source/Drain Contacts in Advanced Semiconductor Devices
Microsc. Microanal. Proceedings, (2018), 24, S1, 8-9, doi: 10.1017/S1431927618000533
https://doi.org/10.1017/S1431927618000533 Published online by Cambridge University Press
J Li
IBM Research
H Niimi
GLOBALFOUNDRIES
O Gluschenkov
P Adusumilli
IBM Research
J Fronheiser
GLOBALFOUNDRIES
S Mochizuki
Z Liu
IBM Research
V Kamineni
GLOBALFOUNDRIES et. al.
Not for further distribution unless allowed by the License or with the express written permission of Cambridge University Press.
https://doi.org/10.1017/S1431927618000533
uuid:80450b2a-1c91-4a0b-9e0f-0046a9ed0087
uuid:0405f794-1ec2-4c59-a18e-ce2190c723b2
endstream
endobj
3 0 obj
<<
/Type /Pages
/MediaBox [0 0 612 792]
/Count 2
/Kids [5 0 R 6 0 R]
>>
endobj
5 0 obj
<<
/Type /Page
/Parent 3 0 R
/Resources <<
/ProcSet [/PDF /Text]
/ColorSpace <<
/Cs1 [/ICCBased 7 0 R]
>>
/Font <<
/TT3 8 0 R
/TT1 9 0 R
/TT2 10 0 R
/Xi0 11 0 R
/F5 12 0 R
>>
>>
/Contents [13 0 R 14 0 R 15 0 R 16 0 R]
/MediaBox [0 0 612 792]
/Annots [17 0 R]
>>
endobj
6 0 obj
<<
/Type /Page
/Parent 3 0 R
/Resources <<
/ProcSet [/PDF /Text /ImageB /ImageC /ImageI]
/ColorSpace <<
/Cs1 [/ICCBased 7 0 R]
>>
/Font <<
/TT1 9 0 R
/TT4 18 0 R
/TT3 8 0 R
/TT2 10 0 R
/TT5 19 0 R
/Xi1 11 0 R
/F7 12 0 R
>>
/XObject <<
/Im3 20 0 R
/Im1 21 0 R
/Im2 22 0 R
/Im4 23 0 R
>>
>>
/Contents [24 0 R 25 0 R 26 0 R 27 0 R]
/MediaBox [0 0 612 792]
/Annots [28 0 R]
>>
endobj
7 0 obj
<<
/Length 2612
/N 3
/Alternate /DeviceRGB
/Filter /FlateDecode
>>
stream
xwTSϽ7" %z ;HQIP&vDF)VdTG"cEb PQDEk 5ޚYg} PtX4X\XffGD=HƳ.d,P&s"7C$
E6<~&S2)212 "įl+ɘ&Y4Pޚ%ᣌ\%g|eTI (L 0_&l2E 9r9h xgIbטifSb1+MxL0oE%YmhYh~S=zU&ϞAYl/ $ZU m@O ޜl^'lsk.+7oʿ9V;?#I3eE妧KDd9i,UQ h