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In-Situ Preparation of Y-Ba-Cu-O Thin Films Using Mass-Spectrometer Rate Control and Atomic Oxygen

Published online by Cambridge University Press:  26 February 2011

H. Ohlsén ,
M. Ottosson ,
J. Hudner ,
M. ÖStling ,
L. Stolt ,
P. Nordblad ,
J. -C. Villegrer ,
H. Moriceau ,
F. Weiss  and
O. Thomas
H. Ohlsén
Affiliation:
Swedish Institute of Microelectronics, P. O. Box 1084, S-164 21 Kista, Sweden
M. Ottosson
Affiliation:
Thin Film and Surface Group, Dept. of Inorganic Chemistry, Uppsala University, P.O. Box 531, S-751 21 Uppsala, Sweden
J. Hudner
Affiliation:
DepL of Solid State Electronics, KTH, P. O. Box 1298, S-164 28 Kista, Sweden Lab. des Matériaux et du Génie Physique, ENSPG, BP 46, 38402 St Martin d'Hères Cedex, France
M. ÖStling
Affiliation:
DepL of Solid State Electronics, KTH, P. O. Box 1298, S-164 28 Kista, Sweden
L. Stolt
Affiliation:
Swedish Institute of Microelectronics, P. O. Box 1084, S-164 21 Kista, Sweden DepL of Solid State Electronics, KTH, P. O. Box 1298, S-164 28 Kista, Sweden
P. Nordblad
Affiliation:
DepL of Solid State Physics, Uppsala University, P. O. Box 534, S-751 21 Uppsala, Sweden
J. -C. Villegrer
Affiliation:
LETI-DTA-DOPT, 85X, 38041 Grenoble Cedex, France
H. Moriceau
Affiliation:
LETI-DTA-DOPT, 85X, 38041 Grenoble Cedex, France
F. Weiss
Affiliation:
Lab. des Matériaux et du Génie Physique, ENSPG, BP 46, 38402 St Martin d'Hères Cedex, France
O. Thomas
Affiliation:
Lab. des Matériaux et du Génie Physique, ENSPG, BP 46, 38402 St Martin d'Hères Cedex, France
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Abstract

Thin films of YBCO were prepared using a mass-spectrometer controlled coevapora-tion/MBE process with atomic oxygen. Under the conditions of low pressure, necessary for mass-spectrometer rate control, it is shown that an atomic oxygen beam source can be utilized in order to grow high quality thin films of YBCO as well as multi-layer structures involving YBCO and Y2O3. Values of Tc = 88.5 K and Jc = 6–106 A/cm2 at 77 K were determined for a strip with a width of 10 μm of YBCO deposited on a LaAlO3 substrate. Film structure is analyzed by XRD and rocking curve measurements. Magnetic characterization of films and multi-layer structures are reported.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 275: Symposium S – Layered Superconductors: Fabrication, Properties and Applications , 1992 , 299
Copyright
Copyright © Materials Research Society 1992

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References

REFERENCES

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