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Inorganic-organic Hybrid Materials (ORMOCER®s) for Multilayer Technology – Passivation and Dielectric Behavior

Published online by Cambridge University Press:  21 March 2011

R. Houbertz ,
L. Fröhlich ,
J. Schulz  and
M. Popall
R. Houbertz*
Affiliation:
Fraunhofer-Institut für Silicatforschung, Neunerplatz 2, D-97082 Würzburg, Germany
L. Fröhlich
Affiliation:
Fraunhofer-Institut für Silicatforschung, Neunerplatz 2, D-97082 Würzburg, Germany
J. Schulz
Affiliation:
Fraunhofer-Institut für Silicatforschung, Neunerplatz 2, D-97082 Würzburg, Germany
M. Popall
Affiliation:
Fraunhofer-Institut für Silicatforschung, Neunerplatz 2, D-97082 Würzburg, Germany
*
*to whom correspondence should be addressed
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Abstract

Inorganic-organic hybrid polymers (ORMOCER®s) have been synthesized by sol-gel processing. The materials can be functionalized such that their physical and chemical properties can be reproducibly tailored towards the desired application, i.e., electronics, optics (passives/actives) or passivation technology. Besides, the materials which show negative resist behavior, can be patterned by UV exposure with good resolution. The materials are well-suited for thin and thick film technology using conventional coating technology, applied in multi-layer technology. We here particularly focus on materials for passivation against environmental influences, which additionally exhibit very good dielectric properties.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 665: Symposium C – Electronic, Optical and Optoelectronic Polymers and Oligomers , 2001 , C8.16
Copyright
Copyright © Materials Research Society 2001

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Footnotes

®

Registered trademark of Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. in Germany

References

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