2 results
A Method for Producing Site-Specific TEM Specimens from Low Contrast Materials with Nanometer Precision
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- Journal:
- Microscopy and Microanalysis / Volume 19 / Issue 1 / February 2013
- Published online by Cambridge University Press:
- 04 February 2013, pp. 73-78
- Print publication:
- February 2013
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- Article
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Focused Ion Beam Sectioning and Lift-out Method for Copper and Resist Vias in Organic Low-k Dielectrics
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- Journal:
- Microscopy and Microanalysis / Volume 8 / Issue 6 / December 2002
- Published online by Cambridge University Press:
- 06 December 2002, pp. 502-508
- Print publication:
- December 2002
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- Article
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