1 results
Micro-System Displacement and Profile Measurement By an Integrated Photon Tunneling and Confocal Microscope
-
- Journal:
- Journal of Mechanics / Volume 18 / Issue 4 / December 2002
- Published online by Cambridge University Press:
- 05 May 2011, pp. 173-183
- Print publication:
- December 2002
-
- Article
- Export citation